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Stress Gradients and Anisotropy in Thin Films

Published online by Cambridge University Press:  22 February 2011

Robert M. Fisher ,
J. Z. Duan  and
Alan G. Fox
Robert M. Fisher
Affiliation:
Center for Advanced Materials, Lawrence Berkeley Laboratory, University of California, Berkeley, CA 94720
J. Z. Duan
Affiliation:
Center for Advanced Materials, Lawrence Berkeley Laboratory, University of California, Berkeley, CA 94720
Alan G. Fox
Affiliation:
Center for Advanced Materials, Lawrence Berkeley Laboratory, University of California, Berkeley, CA 94720
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Abstract

Indications that steep through-thickness strain gradients occur in vapour-deposited chromium films stemming from previous observations of film curling during spontaneous delamination from substrates, have been substantiated by analysis and simulation of Bragg X-Ray diffraction peaks. The presence of large through-thickness compressive strains, that increase quadratically with distance from the substrate from about zero at the interface to around 0.8% at the film surface, was deduced by empirical computer matching of diffraction peak shapes.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 130: Symposium C – Thin Films: Stresses and Mechanical Properties I , 1988 , 249
Copyright
Copyright © Materials Research Society 1989

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References

[1] Fisher, R.M., Duan, J.Z. and Fox, A.G., Proc. of the Materials Research Society Spring 1988 Meeting, Reno, to be published.Google Scholar
[2] Fisher, R.M., EMSA proc. (1987), p. 236.Google Scholar
[3] Fisher, R.M., Duan, J.Z. and Fox, A.G., J. of Mat. Sci. and Eng. (in press).Google Scholar
[4] Cullity, B.D., Elements of X-Ray Diffraction (Addison Wesley Pub. Co., 1956).Google Scholar
[5] Warren, B.E. and Averbach, B.S., J. Appl. Phys. 21, 595 (1950).Google Scholar
[6] Duan, J.Z., Hetherington, C.J.D. and Fisher, R.M., EMSA Proc. (1988), p. 560.Google Scholar