Hostname: page-component-8448b6f56d-42gr6 Total loading time: 0 Render date: 2024-04-16T07:59:00.505Z Has data issue: false hasContentIssue false
  • English
  • Français

Stress-Caused Deflections of Asymmetrical Coated Single-Crystal Silicon Elements

Published online by Cambridge University Press:  10 February 2011

M. Kuechler ,
K. Griesbach ,
A. Bertz ,
T. Gessner ,
W. Faust  and
R. Dudek
M. Kuechler
Affiliation:
Chemnitz University of Technology, Center of Microtechnologies, D-09107 Chemnitz, GERMANY, kuechler @e-technik.tu-chemnitz.de
K. Griesbach
Affiliation:
Chemnitz University of Technology, Center of Microtechnologies, D-09107 Chemnitz, GERMANY, kuechler @e-technik.tu-chemnitz.de
A. Bertz
Affiliation:
Chemnitz University of Technology, Center of Microtechnologies, D-09107 Chemnitz, GERMANY, kuechler @e-technik.tu-chemnitz.de
T. Gessner
Affiliation:
Chemnitz University of Technology, Center of Microtechnologies, D-09107 Chemnitz, GERMANY, kuechler @e-technik.tu-chemnitz.de
W. Faust
Affiliation:
Fraunhofer IZM Berlin/Chemnitz, GERMANY
R. Dudek
Affiliation:
Fraunhofer IZM Berlin/Chemnitz, GERMANY
Get access

Abstract

Long and narrow beams of single crystal silicon were made by surrounding them with trenches of different width followed by dry release etch. The beams were coated nonconformally during fabrication. Depending on the asymmetry of the films coated onto the beam sidewalls they tend to bend laterally. This deflection has been analyzed experimentally and by FEM-Simulations.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 546: Symposium AA – Materials Science of Microelectromechanical Systems (MEMS)… , 1998 , 33
Copyright
Copyright © Materials Research Society 1999

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Heuberger, A. Mikromechanik Springer-Verlag, Berlin, 1991 Google Scholar
2. Mihailovich, R. E. and MacDonald, N. C., Sensors and Actuators A 50, pp. 199–207 (1995)Google Scholar
3. Shaw, K. A. and MacDonald, N. C., Proceedings MEMS 1996, San Diego, 1996, pp. 44–48 Google Scholar
4. Shaw, K. A., Zhang, Z. L. and MacDonald, N. C., Sensors and Actuators A 40, pp. 63–70 (1994)Google Scholar
5. Kuechler, M., Bertz, A., Griesbach, K. and Gessner, T., Proceedings Mikrosystemtechnik ‘97, Chemnitz, 1997, pp. 259–265 Google Scholar
6. Saif, M. T. A. and MacDonald, N. C., SPIE 2441, pp. 329–340 (1995)Google Scholar
7. Griesbach, K., Bertz, A., Faust, W., Dudek, R., Kuechler, M. and Gessner, T., Proceedings of Actuator 98, Bremen, 1998, pp. 82–85 Google Scholar
8. Cheng, H. C. in ULSI Technology, edited by Chang, C. Y. and Sze, S. M., McGraw-Hill, New York, 1996, pp. 221–222 Google Scholar