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Thermal Conductivity of Porous Silicon Evaluated from Phase Characteristics of Photoacoustic Spectroscopy

  • Masato Ohmukai (a1), Hirokazu Shimizu (a1) and Yasuo Tsutsumi (a1)


Porous silicon (PS), well known as a visible luminescent material, has been revealed to be an attractive candidate for an ultrasonic emitter recently. Since the ultrasonic emission is based on a thermal process it is important to evaluate thermal properties of PS. We then evaluated the thermal conductivity of PS from the phase delay in a photoacoustic (PA) signal. We report the dependence of thermal conductivity on anodization time in forming PS.



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