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Thermal Effects During Microwave Plasma Sintering of Ceramics

Published online by Cambridge University Press:  28 February 2011

Matthew Hsu
Affiliation:
Northwestern University, Dept. of Materials Science and Engineering, Evanston, IL 60208-3108
Mwry P. Sweeney
Affiliation:
Northwestern University, Dept. of Materials Science and Engineering, Evanston, IL 60208-3108
D. Lynn Johnson
Affiliation:
Northwestern University, Dept. of Materials Science and Engineering, Evanston, IL 60208-3108
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Abstract

A variety of ceramic materials have been heated in various microwave excited plasmas at reduced pressures. Temperatures were measured by optical fiber thermometry. Specimen heating was accomplished by direct contact with the plasma, as well as direct coupling withthe microwave energy, although the latter was screened heavily by the plasma. Higher specimen temperatures were achieved in polyatomic gases which have greater reactional enthalpy. In general, insulating materials achieved higher temperatures than semiconducting or covalently bonded materials.

Type
Research Article
Copyright
Copyright © Materials Research Society 1991

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References

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