Skip to main content
×
×
Home

Thermal stability of post-growth-annealed Ga-doped MgZnO films grown by the RF sputtering method

  • Kuang-Po Hsueh (a1), Po-Wei Cheng (a1), Wen-Yen Lin (a1), Hsien-Chin Chiu (a2), Hsiang-Chun Wang (a2), Jinn-Kong Sheu (a3) and Yu-Hsiang Yeh (a3)...
Abstract

A radio-frequency magnetron sputtering technique and subsequent rapid thermal annealing (RTA) at 600, 700, 800, and 900 °C were implemented to grow high-quality Ga-doped MgxZn1-xO (GMZO) epi-layers. The GMZO films were deposited using a radio-frequency magnetron sputtering system and a 4 inch ZnO/MgO/Ga2O3 (75/20/5 wt %) target. The Hall results, X-ray diffraction (XRD), and transmittance were determined and are reported in this paper. The Hall results indicated that the increase in mobility was likely caused by the improved crystallization in the GMZO films after thermal annealing. The XRD results revealed that MgxZn1-xO (111) and MgO2 (200) peaks were obtained in the GMZO films. The absorption edges of the as-grown and annealed GMZO films shifted toward the short wavelength of 373 nm at a transmittance of 90%. According to these results, GMZO films are feasible for forming transparent contact layers for near-ultraviolet light-emitting diodes.

Copyright
Corresponding author
*Electronic mail: kphsueh@mail.vnu.edu.tw
References
Hide All
1. Neumann, M. D., Cobet, C., Esser, N., Laumer, B., Wassner, T. A., Eickhoff, M., Feneberg, M., and Goldhahn, R., J. Appl. Phys. 110, 013520 (2011).
2. Chen, X., Ruan, K., Wu, G., and Bao, D., Appl. Phys. Lett. 93, 112112 (2008).
Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
  • URL: /core/journals/mrs-online-proceedings-library-archive
Please enter your name
Please enter a valid email address
Who would you like to send this to? *
×

Keywords

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed