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Three-Dimensional Electronic Surfaces

  • J.C. Sturm (a1), P.I. Hsu (a1), S.M. Miller (a1), H. Gleskova (a1), A. Darhuber (a1), M. Huang (a1), S. Wagner (a1), S. Troian (a1) and Z. Suo (a1)...
Abstract
Abstract

There is an increasing interest in electronics functionality on surfaces which are not planar. This paper examines the critical technologies for fabricating electronic surfaces which have a three-dimensional shape. Two different approaches for achieving such a goal are examined. One can fabricate electronics using conventional technologies on a flat surface, and then after fabrication deform that surface into the desired shape (e.g. a spherical cap). In an alternative approach, one can directly fabricate onto substrates with an arbitrary shape. In this case one must address the issue of pattern formation and transfer on the curved surfaces. The scaling of letterpress printing to micron-scale features on flat and spherically curved surfaces is demonstrated.

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1.Hsu P-H.I., Huang M., Wagner S., Suo Z., and Sturm J.C., Proc. Symp. Mat. Res. Soc. 621, Spring 2000.
2.Gleskova H., Wagner S., and Suo Z., Mat. Res. Soc. Proc. Symp. 508, 73 (1998).
3.Theiss S.D. and Wagner S., IEEE Elec. Dev. Lett. 17, 578580 (1996).
4.Ma E. Y., Theiss S. D., Lu M. H., Wu C. C., Sturm J. C., and Wagner S., Tech. Dig. Int. Elect. Dev. Mtg., 535538 (1997).
5.Gleskova H., Wagner S. and Suo Z., Appl. Phys. Lett. 75, 30113013 (1999).
6.Thomasson D. B., Bonse M., Huang J. R., Wronski C. R., and Jackson T. N., Tech. Dig. Int. Elect. Dev. Mtg., 253256 (1998).
7.Parsons G.N., Yang C.S., Arthur C.B., Klein T.M., and Smith L., Mat. Res. Soc. Symp. Proc 508, 19 (1998).
8.Constant A., Burns S. G., Shanks H., Constant A., Gruber C., Schmidt D., Landin A., and Olympie F., Proc. Electrochem. Soc. 96–23, 382 (1997).
9.Suo Z., Ma E.Y., Gleskova H. and Wagner S., App. Phys. Lett. 74, 1177 (1999).
10.Kumar A., Biebuyck H. A., and Whitesides G. M., Langmuir. 10, 1498 (1994).
11.Xia Younan, and Whitesides George M., Angew. Chem. Int. Ed. 37, 551 (1998).
12.Bao Zhenan, Rogers John A., and Katz Howard, J. Mater. Chem. 9, 1895 (1999).
13.Bruno Michael H., ed., Pocket Pal: A Graphic Arts Production Handbook, 16th ed., International Paper Company, 1995.
14.Mikami Yoshiro et al. , IEEE Trans. Electron Devices 41, 306 (1994).
15.Lahti M., Leppävuori S., and Lantto V., Appl. Surf. Sci. 142, 367 (1999).
16.Chou Stephen Y., Krauss Peter R., and Renstrom Preston J., J. Vac. Sci. Technol. B, 14, 4129 (1996).
17.Heidari Babek, Maximov Ivan, Sarwe Eva-Lena, and Montelius Lars, J. Vac. Sci. Technol. B 17, 2961 (1999).
18.Darhuber Anton A., Troian Sandra M., Miller Scott M., and Wagner Sigurd, J. Appl. Phys. 87, 7768 (2000).
19.Miller Scott M., Darhuber Anton A., Troian Sandra M., and Wagner Sigurd in Materials Development for Direct Write Technologies edited by Chrisey D.B. et al. (Mater. Res. Soc. Proc. 624, Pittsburgh, PA in press).
20.Darhuber Anton A., Miller Scott M., Troian Sandra M., and Wagner Sigurd in Materials Development for Direct Write Technologies edited by Chrisey D.B. et al. (Mater. Res. Soc. Proc. 624, Pittsburgh, PA in press).
21.Darhuber Anton A., Troian Sandra M., Davis Jeffrey M., Miller Scott M., and Wagner Sigurd, J. Appl. Phys. 88, 5119 (2000).
22.Gokan H., Esho S., and Ohnishi Y., J. Electrochem. Soc. 130, 143 (1983).
23.Harrison C., Park M., Chaikin P. M., Register R. A., and Adamson D. H., J. Vac. Sci. Technol. B 16, 544 (1998).
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  • EISSN: 1946-4274
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