Skip to main content
×
×
Home

Three-Dimensional Electronic Surfaces

  • J.C. Sturm (a1), P.I. Hsu (a1), S.M. Miller (a1), H. Gleskova (a1), A. Darhuber (a1), M. Huang (a1), S. Wagner (a1), S. Troian (a1) and Z. Suo (a1)...
Abstract

There is an increasing interest in electronics functionality on surfaces which are not planar. This paper examines the critical technologies for fabricating electronic surfaces which have a three-dimensional shape. Two different approaches for achieving such a goal are examined. One can fabricate electronics using conventional technologies on a flat surface, and then after fabrication deform that surface into the desired shape (e.g. a spherical cap). In an alternative approach, one can directly fabricate onto substrates with an arbitrary shape. In this case one must address the issue of pattern formation and transfer on the curved surfaces. The scaling of letterpress printing to micron-scale features on flat and spherically curved surfaces is demonstrated.

Copyright
References
Hide All
1. Hsu, P-H.I., Huang, M., Wagner, S., Suo, Z., and Sturm, J.C., Proc. Symp. Mat. Res. Soc. 621, Spring 2000.
2. Gleskova, H., Wagner, S., and Suo, Z., Mat. Res. Soc. Proc. Symp. 508, 73 (1998).
3. Theiss, S.D. and Wagner, S., IEEE Elec. Dev. Lett. 17, 578580 (1996).
4. Ma, E. Y., Theiss, S. D., Lu, M. H., Wu, C. C., Sturm, J. C., and Wagner, S., Tech. Dig. Int. Elect. Dev. Mtg., 535538 (1997).
5. Gleskova, H., Wagner, S. and Suo, Z., Appl. Phys. Lett. 75, 30113013 (1999).
6. Thomasson, D. B., Bonse, M., Huang, J. R., Wronski, C. R., and Jackson, T. N., Tech. Dig. Int. Elect. Dev. Mtg., 253256 (1998).
7. Parsons, G.N., Yang, C.S., Arthur, C.B., Klein, T.M., and Smith, L., Mat. Res. Soc. Symp. Proc 508, 19 (1998).
8. Constant, A., Burns, S. G., Shanks, H., Constant, A., Gruber, C., Schmidt, D., Landin, A., and Olympie, F., Proc. Electrochem. Soc. 96–23, 382 (1997).
9. Suo, Z., Ma, E.Y., Gleskova, H. and Wagner, S., App. Phys. Lett. 74, 1177 (1999).
10. Kumar, A., Biebuyck, H. A., and Whitesides, G. M., Langmuir. 10, 1498 (1994).
11. Xia, Younan, and Whitesides, George M., Angew. Chem. Int. Ed. 37, 551 (1998).
12. Bao, Zhenan, Rogers, John A., and Katz, Howard, J. Mater. Chem. 9, 1895 (1999).
13. Bruno, Michael H., ed., Pocket Pal: A Graphic Arts Production Handbook, 16th ed., International Paper Company, 1995.
14. Mikami, Yoshiro et al. , IEEE Trans. Electron Devices 41, 306 (1994).
15. Lahti, M., Leppävuori, S., and Lantto, V., Appl. Surf. Sci. 142, 367 (1999).
16. Chou, Stephen Y., Krauss, Peter R., and Renstrom, Preston J., J. Vac. Sci. Technol. B, 14, 4129 (1996).
17. Heidari, Babek, Maximov, Ivan, Sarwe, Eva-Lena, and Montelius, Lars, J. Vac. Sci. Technol. B 17, 2961 (1999).
18. Darhuber, Anton A., Troian, Sandra M., Miller, Scott M., and Wagner, Sigurd, J. Appl. Phys. 87, 7768 (2000).
19. Miller, Scott M., Darhuber, Anton A., Troian, Sandra M., and Wagner, Sigurd in Materials Development for Direct Write Technologies edited by Chrisey, D.B. et al. (Mater. Res. Soc. Proc. 624, Pittsburgh, PA in press).
20. Darhuber, Anton A., Miller, Scott M., Troian, Sandra M., and Wagner, Sigurd in Materials Development for Direct Write Technologies edited by Chrisey, D.B. et al. (Mater. Res. Soc. Proc. 624, Pittsburgh, PA in press).
21. Darhuber, Anton A., Troian, Sandra M., Davis, Jeffrey M., Miller, Scott M., and Wagner, Sigurd, J. Appl. Phys. 88, 5119 (2000).
22. Gokan, H., Esho, S., and Ohnishi, Y., J. Electrochem. Soc. 130, 143 (1983).
23. Harrison, C., Park, M., Chaikin, P. M., Register, R. A., and Adamson, D. H., J. Vac. Sci. Technol. B 16, 544 (1998).
Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
  • URL: /core/journals/mrs-online-proceedings-library-archive
Please enter your name
Please enter a valid email address
Who would you like to send this to? *
×

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 7 *
Loading metrics...

Abstract views

Total abstract views: 87 *
Loading metrics...

* Views captured on Cambridge Core between September 2016 - 21st April 2018. This data will be updated every 24 hours.