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Trapping and Detrapping of H in Si: Impact on Diffusion Properties and Solar Cell Processing
Published online by Cambridge University Press: 01 February 2011
Abstract
Influence of trapping and detrapping on the diffusion behavior of H in Si is investigated using both experiment and theory. Experimental H (or D) diffusion profiles, produced by plasma and ion implantation processes, are fitted with a theoretical model. This model includes three kinds of traps – stationary, process-induced, and mobile. Excellent correlation between theory and experiment is observed. Best–fit parameters provide an insight into the trapping mechanisms. We also show how some of the problems resulting from trapping can be circumvented by suitable process conditions.
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- Copyright © Materials Research Society 2002
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