Skip to main content
×
×
Home

Use of Valved, Solid Group V Sources for the Growth of GaAs/GaInP Heterostructures by Molecular Beam Epitaxy

  • F. G. Johnson (a1), G. W. Wicks (a1), R. E. Viturro (a2) and R. Laforce (a2)
Abstract

We report on the first growth of GaAs/Ga0.5In0.5P heterostructures by conventional molecular beam epitaxy using solid-source valved crackers to supply both the arsenic and the phosphorus fluxes. By regulating the group V fluxes with the cracker needle valves, arsenide-phosphide heterostructures were successfully grown with virtually no group V intermixing between layers. For comparison, similar heterostructure samples were grown using only the mechanical shutters to switch between group V fluxes, and the resulting layers were severely intermixed. The amount of group V intermixing was shown to be independent of whether As2 or As4 fluxes were used to grow the layers. A GaAs/Ga0.5In0.5P multiple quantum well sample was also grown using the valved crackers. Photoluminescence peaks were clearly observed from 40 Å, 80 Å, and 300 Å GaAs quantum wells, but no luminescence was detected from a 20 Å well. An 80Å GaAs/ 80Å Ga0.5In0.5P superlattice was grown, and superlattice satellite peaks were observed in the X-ray rocking curves. The appearance of misfit dislocations suggests localized intermixing at the interfaces.

Copyright
References
Hide All
1. Razeghi, M., Maurel, P., Omnes, F., Ben Armor, S., Dmowski, L., and Portal, J.C., Appl. Phys. Lett. 48, 1267 (1986).
2. He, Xiaoguang and Razeghi, Manijeh, Appl. Phys. Lett. 61, 1703 (1992).
3. Lee, H.Y., Hafich, M.J., and Robinson, G.Y., J. Cryst. Growth 105, 244 (1990).
4. Foxon, C.T., Joyce, B.A., Norris, M.T., J. Cryst. Growth 49, 132 (1980).
5. Arthur, J.R. and LePore, J.J., J. Vac. Sci. Technol. 6, 545 (1969).
6. Huet, D., Lambert, M., Bonnevie, D., and Dufresne, D., J. Vac. Sci. Technol. B 3, 823 (1985).
7. Miller, D.L., Bose, S.S., and Sullivan, G.J., J. Vac. Sci. Technol. B 8, 311 (1990).
8. Wicks, G.W., Koch, M.W., Varriano, J.A., Johnson, F.G., Wie, C.R., Kim, H.M., and Colombo, P., Appl. Phys. Lett. 59, 342 (1991).
9. Varriano, J.A., Koch, M.W., Johnson, F.G., and Wicks, G.W., J. Electron. Mater. 21, 195 (1992).
10. Wood, C.E.C., Desimone, D., Singer, K., and Wicks, G.W., J. Appl. Phys. 53, 4230 (1982).
11. Hou, H.Q., Liang, B.W., Ho, M.C., Chin, T.P., and Tu, C.W., J. Vac. Sci. Technol. B 10, 953 (1992).
12. Chow, R. and Fernandez, R., Mater. Res. Soc. Symp. Proc. 145, 13 (1989).
13. Wood, C.E.C., Stanley, C.R., Wicks, G.W., and Esi, M.B., J. Appl. Phys. 54, 1868 (1983).
14. Nagao, S., Takashima, M., Inoue, Y., Katoh, M., and Gotoh, H., J. Cryst. Growth 111, 521 (1991).
15. Garcia, J.C., Maurel, P., Bove, P., and Hirtz, J.P., Jpn. J. Appl. Phys. 30, 1186 (1991).
16. Herman, M.A., Bimburg, D., and Christen, J., J. Appl. Phys. 70, Rl (1991).
17. Welch, D.F., Wicks, G.W., and Eastman, L.F., Appl. Phys. Lett. 46, 991 (1985).
Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
  • URL: /core/journals/mrs-online-proceedings-library-archive
Please enter your name
Please enter a valid email address
Who would you like to send this to? *
×

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed