Hostname: page-component-7d8f8d645b-2q4x6 Total loading time: 0 Render date: 2023-05-30T00:45:31.142Z Has data issue: false Feature Flags: { "useRatesEcommerce": true } hasContentIssue false

Dedicated STEM for 200 to 40 keV operation*

Published online by Cambridge University Press:  13 June 2011

N. Dellby
Nion Co., 1102 8th St., Kirkland, WA 98033, USA
N.J. Bacon
Nion Co., 1102 8th St., Kirkland, WA 98033, USA
P. Hrncirik
Nion Co., 1102 8th St., Kirkland, WA 98033, USA
M.F. Murfitt
Nion Co., 1102 8th St., Kirkland, WA 98033, USA
G.S. Skone
Nion Co., 1102 8th St., Kirkland, WA 98033, USA
Z.S. Szilagyi
Nion Co., 1102 8th St., Kirkland, WA 98033, USA
O.L. Krivanek*
Nion Co., 1102 8th St., Kirkland, WA 98033, USA


HTML view is not available for this content. However, as you have access to this content, a full PDF is available via the ‘Save PDF’ action button.

A dedicated STEM developed for operation at primary energies from 200 keV to 40 keV and lower is described. It has a new cold field emission gun (CFEG) that gives a normalized brightness of 3 × 108 A/(m2 sr V), and excellent short-term and long-term stability. It includes two gun lenses (one electrostatic and one electromagnetic), a fast electrostatic beam blanker, three condenser lenses, a corrector of third- and fifth-order geometric aberrations, an objective lens with low aberration coefficients, a flexible set of projector lenses, an ultra-stable sample stage, and provision for storing up to five samples under high vacuum and loading them into the microscope’s objective lens under remote control. The microscope is enclosed in a magnetically and acoustically shielding enclosure, which allows it to operate at a high performance level even in non-optimal environments. It has reached 53 pm resolution at 200 keV and 123 pm at 40 keV, and an EELS energy resolution of 0.26 eV.

Research Article
© EDP Sciences, 2011



Dedicated to Christian Colliex


Krivanek, O.L., Dellby, N., Lupini, A.R., Ultramicroscopy 78, 1 (1999)CrossRef
Batson, P.E., Dellby, N., Krivanek, O.L., Nature 418, 617 (2002)CrossRef
Krivanek, O.L., Nellist, P.D., Dellby, N., Murfitt, M.F., Szilagyi, Z., Ultramicroscopy 96, 229 (2003)CrossRef
Erni, R., Rossell, M.D., Kisielowski, C., Dahmen, U., Phys. Rev. Lett. 102, 096101 (2009)CrossRef
Sawada, H., Tanishiro, Y., Ohashi, N., Tomita, T., Hosokawa, F., Kaneyama, T., Kondo, Y., Takayanagi, K., J. Electron Microsc. 58, 357 (2009)CrossRef
Hawkes, P.W. (ed.), in Advances in Imaging and Electron Physics, Vol. 153 (Elsevier, Amsterdam, 2008), p. 121Google Scholar
Pennycook, S.J., Nellist, P.D. (eds.), Scanning Transmission Electron Microscopy (Springer, 2011)CrossRefGoogle ScholarPubMed
Krivanek, O.L., Corbin, G.J., Dellby, N., Elston, B.F., Keyse, R.J., Murfitt, M.F., Own, C.S., Szilagyi, Z.S., Woodruff, J.W., Ultramicroscopy 108, 179 (2008)CrossRef
Muller, D.A., Kourkoutis, L.F., Murfitt, M.F., Song, J.H., Hwang, H.Y., Silcox, J., Dellby, N., Krivanek, O.L., Science 319, 1073 (2008)CrossRef
Kourkoutis, L.F., Song, J.H., Hwang, H.Y., Muller, D.A., Proc. Natl. Acad. Sci. 107, 11682 (2010)CrossRef
Garcia-Barriocanal, J., Bruno, F.Y., RiveraCalzada, A., Sefrioui, Z., Nemes, N.M., Garcia-Hernández, M., Rubio-Zuazo, J., Castro, G.R., Varela, M., Pennycook, S.J., Leon, C., Santamaria, J., Adv. Mater. 22, 627 (2010)CrossRef
Botton, G.A., Lazar, S., Dwyer, C., Ultramicroscopy 110, 926 (2010)CrossRef
Terauchi, M., Tanaka, M., Tsuno, K., Ishida, M., J. Microsc. 194, 203 (1999)CrossRef
Mitterbauer, C., Kothleitner, G., Grogger, W., Zandbergen, H., Freitag, B., Tiemeijer, P., Hofer, F., Ultramicroscopy 96, 469(2003)CrossRef
Suenaga, K., Sato, Y., Liu, Z., Kataura, H., Okazaki, T., Kimoto, K., Sawada, H., Sasaki, T., Omoto, K., Tomita, T., Kaneyama, T., Kondo, Y., Nat. Chem. 1, 415 (2009)CrossRef
Krivanek, O.L., Dellby, N., Murfitt, M.F., Chisholm, M.F., Pennycook, T.J., Suenaga, K., Nicolosi, V., Ultramicroscopy 110, 935 (2010)CrossRef
Krivanek, O.L., Chisholm, M.F., Nicolosi, V., Pennycook, T.J., Corbin, G.J., Dellby, N., Murfitt, M.F., Own, C.S., Szilagyi, Z.S., Oxley, M.P., Pantelides, S.T., Pennycook, S.J., Nature 464, 571 (2010)CrossRef
Krivanek, O.L., Chisholm, M.F., Dellby, N., Murfitt, M.F., in Scanning Transmission Electron Microscopy, edited by Pennycook, S.J, Nellist, P.D. (Springer, 2011)Google Scholar
Wardell, I.M.R., Bovey, P.E., in Advances in Imaging and Electron Physics, edited by Hawkes, P.W., Vol. 159 (Elsevier, Amsterdam, 2009), p.221 Google Scholar
Dellby, N., Krivanek, O.L., Murfitt, M.F., in Physics Procedia, Vol. 1 (Elsevier B.V., Amsterdam, 2008), p. 179183 Google Scholar
Krivanek, O.L., Dellby, N.Murfitt, Handbook of Charged Particle Optics, edited by Orloff, J., 2nd edn. (CRC Press, 2009) pp. 601640Google Scholar
Movie of sample motion at:
Krivanek, O.L., Ursin, J.P., Bacon, N.J., Corbin, G.J., Dellby, N., Hrncirik, P., Murfitt, M.F., Own, C.S., Szilagyi, Z.S., Philos. Trans. Roy. Soc. A 367, 3683 (2009)CrossRef
Krivanek, O.L., Dellby, N., Murfitt, M.F., Szilagyi, Z.S., Chisholm, M.F., Suenaga, K., Proc. Microsc. Microanal. 16, 70 (2010)CrossRef
Williams, D.B., Carter, C.B., Transmission Electron Microscopy, 2nd edn. (Springer, New York, 2009) p. 74Google ScholarPubMed
Tochigi, H., Uchida, H., Shirai, S., Akashi, K., Evins, D.J., Bonnici, J., in Proc. of 27th EMSA Meeting, 1969, pp. 176177Google Scholar
Dellby, N., Lovejoy, T.C., Krivanek, O.L., (2011) (unpublished)
Nellist, P.D., Chisholm, M.F., Dellby, N., Krivanek, O.L., Murfitt, M.F., Szilagyi, Z.S., Lupini, A.R., Borisevich, A., Sides, W.H. Jr., Pennycook, S.J. Science 305, 1741 (2004)CrossRef
Müller, H., Uhlemann, S., Hartel, P., Haider, M., Microsc. Microanal. 12, 1 (2006)
Krivanek, O.L., Bui, D.N., Ray, D.A., Boothroyd, C.B., Humphreys, C.J., in Proc. of 13th Int. EM Congress, Vol. 1, edited by Jouffrey, B., Colliex, C. (Les ÉEditions de Physique, Paris, 1994), p. 167Google Scholar
Kimoto, K., Matsui, Y., J. Microsc. 208, 224 (2002)CrossRef
Gabor, D., The Electron Microscope (Chemical Publishing Company, New York, 1948), p. 3Google Scholar
Muller, D.A., Nat. Mater. 8, 263 (2009)CrossRef