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Spectroscopic Investigations of the Ablation Plume of Several Inorganic Materials

Published online by Cambridge University Press:  01 January 1992

A. Rosenfeld
Affiliation:
Max Born Institute of Non-linear Optics and Short Time Spectroscopy in Research System Berlin e.V. Rudower Chaussee 6, 0-1199 Berlin-Adlershof, Germany
R. Mitzner
Affiliation:
Max Born Institute of Non-linear Optics and Short Time Spectroscopy in Research System Berlin e.V. Rudower Chaussee 6, 0-1199 Berlin-Adlershof, Germany
R. Konig
Affiliation:
Max Born Institute of Non-linear Optics and Short Time Spectroscopy in Research System Berlin e.V. Rudower Chaussee 6, 0-1199 Berlin-Adlershof, Germany
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Abstract

Time resolved absorption spectroscopic investigations of the KrF laser ablation of MgO-ceramics and sapphire on atmospheric conditions were carried out with a time resolution of about 5 ns and a two-dimensional space resolution of less than 100 μm. The time delay between the ablation pulse and the broad band probe pulse was varied from 10 ns up to 10 μs.

Absolute particle densities of the species were determined in dependence on the time delay and on the distance to the surface. The spatial and temporal behaviour of the particles in the ablation plume near the surface was found to be strongly affected both by air atmosphere and the reaction dynamic in the plasma zone. In the case of sapphire the time evolution of the densities of Al, Al+ and AlO species are discussed in comparison to measurements on vacuum conditions.

Type
Research Article
Copyright
Copyright © Materials Research Society 1993

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References

REFERENCES

1. Dyer, P.E. and Sidhu, J., J. Appl. Phys. 64, 4657 (1988).Google Scholar
2. Saenger, K.L., J. Appl. Phys. 66, 4435 (1989).Google Scholar
3. Fukumura, H., Nakaminami, H., Eura, S., Masuhara, H. and Kawai, T., Jap. J. Appl. Phys. 28, 412 (1989).Google Scholar
4. Fukumura, H., Nakaminami, H., Eura, S., Masuhara, H. and Kawai, T., Appl. Phys. Lett. 58, 2546 (1991).Google Scholar
5. Geohegan, D.B. and Mashbum, D.N., Appl. Phys. Lett. 55, 2345 (1989).Google Scholar
6. Cheung, N.H., Ying, Q.Y., Zheng, J.P. and Kwok, H.S., J. Appl. Phys. 69, 6349 (1991).Google Scholar
7. Ventzek, P.L.G., Gilgenbach, R. M., Ching, C. H. and Lindley, R. A., J. Appl. Phys. 72, 1696 (1992)Google Scholar
8. Mitzner, R., Rosenfeld, A., König, R., Appl. Surf. Sc., in pressGoogle Scholar
9. Dreyfus, R.W., Kelly, R., Walkup, R.E., Appl. Phys. Lett. 49, 1478 (1986).Google Scholar
10. Fuhr, J.R. and Wiese, W.L., Handbook of Physics and Chemistry 71, p. 10136 Google Scholar
11. Kusnezova, L.A., Kusmenko, N. E., Kusjakov, J.J. and Plastinin, J.A., QpicaI Transition Probilifies of two-atomic Molecules, edtion Nauka (“Nauka”, Moscow, 1980), p. 82 Google Scholar