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Nucleation and Growth of Gold Nanoparticles Deposited by RF-Sputtering: An Experimental Study

Published online by Cambridge University Press:  21 March 2011

Davide Barreca
Affiliation:
ISTM-CNR and INSTM - Department of Chemical Sciences -, Padova University - Via Marzolo, 1 - 35131 Padova, (Italy)
Alberto Gasparotto
Affiliation:
ISTM-CNR and INSTM - Department of Chemical Sciences -, Padova University - Via Marzolo, 1 - 35131 Padova, (Italy)
Elisabetta Pierangelo
Affiliation:
Department of Chemical Sciences and INSTM -, Padova University - Via Marzolo, 1 - 35131 Padova (Italy)
Eugenio Tondello
Affiliation:
Department of Chemical Sciences and INSTM -, Padova University - Via Marzolo, 1 - 35131 Padova (Italy)
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Abstract

Gold nanoparticles were deposited on SiO2, Si(100) and HOPG (Highly Oriented Pyrolitic Graphite) by RF-sputtering from Ar plasmas. Sample preparation was performed at temperatures as low as 60°C under different total pressures, RF-powers and deposition times, with particular attention to the influence of process parameters and growth surface on nanosystem properties. In this paper, the most important results regarding the compositional, structural and morphological features of the obtained specimens, are presented and discussed.

Type
Research Article
Copyright
Copyright © Materials Research Society 2004

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