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A Model for Texture Evolution in a Growing Film

Published online by Cambridge University Press:  15 February 2011

G. Knuyt ,
C. Quaeyhaegens ,
J. D’Haen  and
L. M. Stals
G. Knuyt
Affiliation:
Limburgs Universitair Centrum, Institute for Materials Research, Wetenschapspark 1, B - 3590 Diepenbeek, Belgium..
C. Quaeyhaegens
Affiliation:
Limburgs Universitair Centrum, Institute for Materials Research, Wetenschapspark 1, B - 3590 Diepenbeek, Belgium..
J. D’Haen
Affiliation:
Limburgs Universitair Centrum, Institute for Materials Research, Wetenschapspark 1, B - 3590 Diepenbeek, Belgium..
L. M. Stals
Affiliation:
Limburgs Universitair Centrum, Institute for Materials Research, Wetenschapspark 1, B - 3590 Diepenbeek, Belgium..
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Abstract

A model for the texture evolution of a growing film was developed, where the tendency for the lowest possible surface energy was taken as the driving force. Two main directions were considered in the orientation distribution of the columns. An initially isotropic distribution was found to evolve to a bimodal one and finally to a distribution with a sharp peak around the orientation with the smallest surface energy. For specific initial conditions the texture turns over from one orientation to the other one. The calculated textures showed a continuous sharpening around orientations with a local or absolute minimum in the surface energy. Various calculated phenomena concerning the texture evolution could be observed on PVD deposited TiN coatings.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 389: Symposium R – Modedling and Simulation of Thin-Film Processing , 1995 , 137
Copyright
Copyright © Materials Research Society 1995

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References

REFERENCES

1 Quaeyhaegens, C., Knuyt, G., D’Haen, J. and Stals, L.M., Thin Solid Films 258, 170 (1995).Google Scholar
2 Stals, L. M. M., Quaeyhaegens, C. and Stappen, M. Van, Surface and Coating Technology 54/55, 121 (1992).Google Scholar
3 Greene, J. E., Barnett, S. A., Sundgren, J.-E. and Rockett, A., in Plasma - Surface Interactions and Processing of Materials, edited by Auciello, O. (Kluwer Academic Publishers, 1990) p. 281. Google Scholar
4 Hultman, L., Münz, W.-D., Musil, J., Kadlec, S., Petrov, I. and Greene, J. E., J. Vac. Sci. Technol. A 9, 434 (1991).Google Scholar
5 Hibbs, M. K., Johansson, B. O., Sundgren, J.-E. and Helmerson, U., Thin Solid Films 122, 115 (1984).Google Scholar
6 Ensinger, W., Surface and Coating Technology 65, 90 (1994).Google Scholar
7 Thompson, C. V. and Floro, J., J. Appl. Phys. 67, 4099 (1990).Google Scholar
8 Srolovitz, D. J., J. Vac. Sci. Technol. A 4, 2925 (1986).Google Scholar
9 Pelleg, J., Zevin, L. Z., Lungo, S. and Croitoru, N., Thin Solid Films 197, 117 (1991).Google Scholar
10 Knuyt, G., Quaeyhaegens, C., D’Haen, J. and Stals, L. M., Thin Solid Films 258, 159 (1995).Google Scholar
11 Chernov, A. A., Modern Crystallography, Vol. 3, Crystal Growth (Springer-Verlag, Berlin, 1984), p. 13. Google Scholar
12 Wolf, D., Phil. Mag. A 63, 337 (1991).Google Scholar
13 Daw, M. S. and Baskes, M. I., Phys. Rev. B 29, 6443 (1984).Google Scholar