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A Low-Range Drift-Free Bio-compatible Pressure Sensor Based on P(VDF-TrFE) Piezoelectric Thin Film

Published online by Cambridge University Press:  31 January 2011

Xiaoyang Li ,
Timothy Reissman ,
Fan Yu  and
Edwin C. Kan
Xiaoyang Li
Affiliation:
xl99@cornell.edu, Cornell University, Electrical and Computer Engineering, ITHACA, New York, United States
Timothy Reissman
Affiliation:
tr34@cornell.edu, Cornell University, Mechanical and Aerospace Engineering, ITHACA, New York, United States
Fan Yu
Affiliation:
fy34@cornell.edu, Cornell University, Electrical and Computer Engineering, ITHACA, New York, United States
Edwin C. Kan
Affiliation:
kan@ece.cornell.edu, Cornell University, Electrical and Computer Engineering, ITHACA, New York, United States
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Abstract

A low-range pressure sensor (0-100kPa) based on the P(VDF-TrFE) piezoelectric thin film is proposed, where the long-term drift is eliminated by operating near the piezoelectric resonance. The pressure sensor is designed for blood pressure and tissue swelling pressure monitoring. The poled 50μm±1μm P(VDF-TrFE) copolymer film is used as the sensing element, with all fabrication and assembly materials biocompatible. A modified Butterworth-Van Dyke (BVD) [1] equivalent circuit model is used to characterize the sensor behavior. The pressure sensor exhibits negligible drift in weeks of operation. The device shows a sensitivity of 0.038MHz/kPa resonance frequency shift under stress, which leads to a maximum readout change of 1.1%/kPa in the present setup.

Keywords

sensorpiezoelectricacoustic
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1222: Symposium DD – Microelectromechanical Systems — Materials and Devices III , 2009 , 1222-DD05-29
Copyright
Copyright © Materials Research Society 2010

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