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Film Bulk Acoustic Resonators for Parallel Mass Sensing

Published online by Cambridge University Press:  21 November 2011

Shih-Jui Chen ,
Anderson Lin ,
Lukas Baumgartel  and
Eun Sok Kim
Shih-Jui Chen
Affiliation:
Department of Electrical Engineering, University of Southern California, CA 90089, USA.
Anderson Lin
Affiliation:
Department of Electrical Engineering, University of Southern California, CA 90089, USA.
Lukas Baumgartel
Affiliation:
Department of Physics, University of Southern California, CA 90089, USA.
Eun Sok Kim
Affiliation:
Department of Electrical Engineering, University of Southern California, CA 90089, USA.
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Abstract

This paper describes the principle of array sensing with film bulk acoustic resonators (FBARs) for combinatory mass sensing and the use of the arrayed FBAR resonant mass sensor for parallel detection of protein-ligand reactions in liquid environment. Various ligands were immobilized on the gold layer on the FBAR’s sensing surface for selective protein detection. The FBARs of the arrayed FBAR were fabricated to have different resonant frequencies from one another by adding slightly varied amount of mass loading on the resonators. Results showed that the arrayed FBAR could detect specific bindings on its surfaces as the concentration of the target ligand was varied.

Keywords

acousticpiezoelectricdevices
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1348: Symposium CC – Hybrid Interfaces and Devices , 2011 , mrss11-1348-cc03-04
Copyright
Copyright © Materials Research Society 2011

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References

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