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Electro-Mechanical Coupling and Power Generation in a Pzt Micro-Engine

Published online by Cambridge University Press:  15 March 2011

D.F. Bahr ,
K.R. Bruce ,
B.W. Olson ,
L.M. Eakins ,
C.D. Richards  and
R.F. Richards
D.F. Bahr
Affiliation:
Mechanical and Materials Engineering, Washington State University, Pullman WA 99164-2920
K.R. Bruce
Affiliation:
Mechanical and Materials Engineering, Washington State University, Pullman WA 99164-2920
B.W. Olson
Affiliation:
Mechanical and Materials Engineering, Washington State University, Pullman WA 99164-2920
L.M. Eakins
Affiliation:
Mechanical and Materials Engineering, Washington State University, Pullman WA 99164-2920
C.D. Richards
Affiliation:
Mechanical and Materials Engineering, Washington State University, Pullman WA 99164-2920
R.F. Richards
Affiliation:
Mechanical and Materials Engineering, Washington State University, Pullman WA 99164-2920
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Abstract

A piezoelectric thin film MEMS device for generating power from a novel heat engine which approaches a Carnot cycle has been developed. The structure of the underlying electrode and PZT thin film generator has been optimized for increased adhesion. Atomic force microscopy was used to track electrode grain size and roughness; generating grain sizes of approximately 100 and 200 nm in diameter and a roughness of about 14-20 nm provide substantial improvements in film adhesion over systems with smaller grains and smoother surfaces. This has led to the ability to operate the engine at frequencies between 10 and 1500 Hz. The system of interest (a fluid filled cavity sealed by a micromachined silicon membrane and the PZT film) shows increased deflections for a given pressure applied to the membrane at frequencies where the system resonates. By operating the system dynamically, it is possible to generate more than 2 V from a single generator structure.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 687: Symposium B – Materials Science of Microelectromechanical Systems (MEMS) Devices IV , 2001 , B4.3
Copyright
Copyright © Materials Research Society 2002

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