Hostname: page-component-76fb5796d-25wd4 Total loading time: 0 Render date: 2024-04-25T21:56:58.581Z Has data issue: false hasContentIssue false
  • English
  • Français

Properties of Electrolyte and Electrode Films Prepared by RF and DC Magnetron Sputtering*

Published online by Cambridge University Press:  21 February 2011

J. B. Bates ,
N. J. Dudney ,
Y. T. Chu  and
P. Mazumdar
J. B. Bates
Affiliation:
Solid State Division, Oak Ridge National Laboratory, Oak Ridge, TN 37831-6030
N. J. Dudney
Affiliation:
Solid State Division, Oak Ridge National Laboratory, Oak Ridge, TN 37831-6030
Y. T. Chu
Affiliation:
Solid State Division, Oak Ridge National Laboratory, Oak Ridge, TN 37831-6030
P. Mazumdar
Affiliation:
Solid State Division, Oak Ridge National Laboratory, Oak Ridge, TN 37831-6030
Get access

Extract

Increased interest in ion conducting thin films and thin-film devices is evidenced by the number of papers on this topic presented at the recent Garmisch conference [1[. Magnetically enhanced (magnetron) sputtering [2,3] is an important technique for depositing these as well as other kinds of ceramic thin films. Two advantages of magnetron over conventional diode sputtering are the increased sputtering rate, which is important in the deposition of ceramic materials, and the reduction in electron bombardment of the substrate and growing film. In this paper, we describe our high-vacuum film growth chamber and present the results of tests of this system in fabricating films of lithium ion conducting glass electrolytes, TiS2, and vanadium oxide by reactive dc and rf magnetron sputtering. The results of combining these films into a thin film lithium battery also are discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 135: Symposium M – Solid State Ionics I , 1988 , 143
Copyright
Copyright © Materials Research Society 1989

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

Footnotes

*

Research sponsored by the Division of Materials Sciences, U.S. Department of Energy under contract No. ACO5-84OR21400 with Martin Marietta Energy Systems, Inc.

References

1. Proceedings of the Sixth International Conference on Solid State Ionics, ed. by Schultz, H. and Weppner, W. (Garmisch-Partenkirchen, FRG, 1987).Google Scholar
2. Waits, R. K. in Thin Film Processes, ed. by Vossen, J. L. and Kern, W. (Academic Press, New York, 1978).Google Scholar
3. Chapman, B., Glow Discharge Processes (Wiley, New York, 1980).Google Scholar
4. Kanehori, K., Matsumoto, K., Miyauchi, K., and Kudo, T., Solid State Ionics 9&10, 1455 (1983).Google Scholar
5. Miyauchi, K., Matsumoto, K., Kanehori, K., and Kudo, T., Denki Kagaku 51, 211 (1983).Google Scholar
6. Miyauchi, K., Oi, T., and Suganuma, T., U.S. Patent No. 4,390,460 (June 28, 1983).Google Scholar
7. Hu, Y-W., Raistrick, I. D., and Huggins, R. A., J. Electrochem. Soc. 124, 1240 (1977).CrossRefGoogle Scholar
8. Goldstein, J. I., Newbury, D. E., Echlin, P., Joy, D. C., Fiori, C., and Lifshin, E., Scanning Electron Microscopy and X-ray Microanalysis (Plenum Press, New York, 1981)CrossRefGoogle Scholar
9. Sreenivas, K. and Sayer, M., J. Appl. Phys. 64, 1484 (1988).CrossRefGoogle Scholar
10. Miyauchi, K., Matsumoto, K., Kandhori, K., and Kudo, T., Solid State Ionics 9/10, 1469 (1983).CrossRefGoogle Scholar
11. Kanehori, K., Ito, Y., Kirino, F., Miyauchi, K., and Kudo, T., Solid State Ionics 18/19, 818 (1986).CrossRefGoogle Scholar
12. Zehnder, D., Deshpandey, C., Dunn, B., and Bunshah, R. F., Solid State Ionics 18/19, 813 (1986).CrossRefGoogle Scholar
13. Aita, C., Liu, Y-L., Kao, M., and Hansen, S. D., J. Appl. Phys. 60, 749 (1986).CrossRefGoogle Scholar
14. Kusano, E., Theil, J. A., and Thornton, J. A., J. Vac. Sci. Technol.A 6, 1663 (1988).CrossRefGoogle Scholar
15. Kennedy, T. N., Hakim, R., and Mackenzie, J. D., Mat. Res. Sci. Bull. 2, 193 (1967).CrossRefGoogle Scholar
16. Audiere, J. P., Madi, A., and Grenet, J. C., J. Mater. Sci. 17, 2973 (1982).CrossRefGoogle Scholar
17. MacChesney, J. B., Potter, J. F., and Guggenheim, H. J., J. Electrochem. Soc. 115, 52 (1968).CrossRefGoogle Scholar
18. Rozgonyi, G. A. and Polito, W. J., J. Electrochem. Soc. 115, 56 (1968).CrossRefGoogle Scholar
19. Szorenyi, T., Bali, K., Torok, M. I., and Hevesi, I., Thin Solid Films 121, 29 (1984).CrossRefGoogle Scholar
20. Sanchez, C., Kivage, J., and Lucazeau, G., J. Raman Spectrosc. 12, 68 (1982).CrossRefGoogle Scholar
21. Jourdaine, L., Souquet, J. L., Delord, V., and Ribes, M., “Lithium Solid State Glass Based Microgenerators,” Solid State lonics, in press (1988).CrossRefGoogle Scholar
22. Jourdaine, L., Bonnat, M., and Souquet, J. L., Solid State Ionics 18/19, 461 (1986).CrossRefGoogle Scholar