Hostname: page-component-76fb5796d-25wd4 Total loading time: 0 Render date: 2024-04-25T19:58:29.466Z Has data issue: false hasContentIssue false
  • English
  • Français

Mechanical Characterization of Interfacial Adhesion in Elastomeric Material for Microelectronic Device through JKR Model Combined with Micro-to-Nano IIT

Published online by Cambridge University Press:  31 January 2011

Gyujei Lee ,
Jae-sung Oh ,
Kwang-yoo Byun ,
Seung-kyun Kang  and
Dongil Kwon
Gyujei Lee
Affiliation:
jerome.lee@hynix.comjerome72@snu.ac.kr, Hynix Semiconductor Inc., R&D, PKG Development, San136-1, Ami-ri, Bubal-eub, Icheon-si, Gyeonggi-do, Icheon, 467-701, Korea, Republic of
Jae-sung Oh
Affiliation:
Jaesung.oh@hynix.com, Hynix Semiconductor Inc., R&D, Icheon, Korea, Republic of
Kwang-yoo Byun
Affiliation:
Kwangyoo.byun@hynix.com, Hynix Semiconductor Inc., R&D, Icheon, Korea, Republic of
Seung-kyun Kang
Affiliation:
skkang@snu.ac.kr, Seoul National University, Materials Science & Engineering, Seoul, Korea, Republic of
Dongil Kwon
Affiliation:
dongilk@snu.ac.kr, Seoul National University, Materials Science & Engineering, Seoul, Korea, Republic of
Get access

Abstract

Instrumented indentation testing (IIT) is a very useful technology for the mechanical characterization of materials. However, existing IIT techniques, which are based on the Hertz model and were developed for hard materials with negligible surface adhesion such as metals and ceramics, are difficult to directly apply to compliant materials such as elastomeric polymers which have viscoelastic hysteresis due to infinitesimal surface/interfacial adhesion. Here we employed some modified model to evaluate the work of adhesion in elastomeric polymer from our previous work, and reinforced our theory and algorithm through empirical approaches so as to consider the time-dependency of viscoelastic material as testing parameter. To do these all, we combined analytic JKR theory and conventional IIT technology to analyze the physical meaning of the theory and then verified our ideas experimentally with elastomeric polymer, PDMS (poly(dimethyl-siloxane)), of various compositions. Our algorithm was developed and verified on a microinstrumented indentation basis and extended even into the nanoinstrumented testing for the micro/nano-scaled applications.

Keywords

adhesionpolymerviscoelasticity
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1159: Symposium G – High-Throughput Synthesis and Measurement Methods for Rapid Optimization and Discovery of Advanced Materials , 2009 , 1159-G06-05
Copyright
Copyright © Materials Research Society 2009

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1 Shaw, J.M. and Reichmanis, E.: Overview of Polymers for Electronics and Photonic Applications and Chemistry of Polymers for Microlithographic Applications: Polymers for Electronics and Photonic Applications, edited by Wong, C.P. (Academic Press, A Harcourt Science and Technology Company, San Diego, CA, 1993).Google Scholar
2 Jarvis, S.P.: Adhesion on the Nanoscale: Nano-Surface Chemistry, edited by Rosoff, M. (Marcel Dekker, Inc., New York, NY, 2002), Ch. 2.Google Scholar
3 Allen, K.W.: Adhesion-1,2 (Applied Science Pub., Ltd., London, UK, 1977).Google Scholar
4 Lee, G., Lee, H. K., Kwon, D.: Interfacial characterization of catalyst coating on electrolyte polymer through microscratch analysis in DMFC. Electrochimica Acta 52, 4215 (2007).Google Scholar
5 Lee, G., Park, S. W., Kang, S. K., Kwon, D.: Characterization of Polymer Adhesion Through Modified JKR Theory and Instrumented Indentation Technique. Key Eng. Mater., 345-346, 1129 (2007).Google Scholar
6 Ebenstein, D.M. and Wahl, K.J.: A comparison of JKR-based methods to analyze quasi-static and dynamic indentation force curves. J.|Coll. Intf. Sci., 298, 652 (2006).Google Scholar
7 Johnson, K.L., Kendall, K., and Roberts, A.D.: Surface energy and the contact of elastic solids. Proc. R. Soc. Lond. A, 324, 301 (1971).Google Scholar
8 Lee, G., Kang, S.K., and Kwon, D.: Characterization of elastic modulus and work of adhesion in elastomeric polymers using microinstrumented indentation technique, Mater. Sci. Eng. A, 496, 494 (2008).Google Scholar
9 Bulychev, S. I., Alekhin, V. P., Shorshorov, M. K., Ternovskii, A. P., and Shnyrev, G. D.: Determining Young's modulus from the indenter penetration diagram. Zavod. Lab. 41, 1137 (1975).Google Scholar
10 Carrillo, F., Gupta, S., Balooch, M., Pruitt, L.A., Marshall, S.J., Marshall, G.W., and Puttlitz, C.M.: Nanoindentation of polydimethylsiloxane elastomers: Effect of crosslinking, work of adhesion, and fluid environment on elastic modulus. J. Mater. Res. 20, 10, 2820 (2005).Google Scholar
11 Hertz, H.: On the contact of rigid elastic solids and on hardness: English Translation in Miscellaneous Papers (1882), edited by Jones, and Schott, (Macmillan 90, London, UK, 1896), p. 156.Google Scholar
12 Johnson, K.L.: Contact mechanics, 2nd ed. (Cambridge Univ. Press, Cambridge, UK, 1999).Google Scholar
13 Oliver, W.C. and Pharr, G.M.: An improved technique for determining hardness and elasticmodulus using load and displacement sensing indentation experiments. J. Mater. Res. 7, 1564 (1992).Google Scholar
14 Oliver, W.C. and Pharr, G.M.: Measurement of hardness and elastic modulus by instrumented indentation: Advances in understanding and refinements to methodology. J. Mater. Res. 19, 3 (2004).Google Scholar