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Focused Electron Beam Induced Deposition of High Resolution Magnetic Scanning Probe Tips

Published online by Cambridge University Press:  15 March 2011

I. Utke ,
F. Cicoira ,
G. Jaenchen ,
P. Hoffmann ,
L. Scandella ,
B. Dwir ,
E. Kapon ,
D. Laub ,
Ph. Buffat  and
N. Xanthopoulos
...Show all authors
I. Utke
Affiliation:
Institute of Applied Optics, IOA-DMT-EPFL, CH-1015 Lausanne, Switzerland
F. Cicoira
Affiliation:
Institute of Applied Optics, IOA-DMT-EPFL, CH-1015 Lausanne, Switzerland
G. Jaenchen
Affiliation:
Institute of Applied Optics, IOA-DMT-EPFL, CH-1015 Lausanne, Switzerland
P. Hoffmann
Affiliation:
Institute of Applied Optics, IOA-DMT-EPFL, CH-1015 Lausanne, Switzerland
L. Scandella
Affiliation:
Nanosurf AG, Grammetstr.14, CH-4410 Liestal, Switzerland
B. Dwir
Affiliation:
Institute of Micro- and Optoelectronics, IMO-DP-EPFL, CH-1015 Lausanne, Switzerland
E. Kapon
Affiliation:
Institute of Micro- and Optoelectronics, IMO-DP-EPFL, CH-1015 Lausanne, Switzerland
D. Laub
Affiliation:
Centre Interdepartemental de Microscopie Electronique, CIME-EPFL, CH-1015 Lausanne, Switzerland
Ph. Buffat
Affiliation:
Centre Interdepartemental de Microscopie Electronique, CIME-EPFL, CH-1015 Lausanne, Switzerland
N. Xanthopoulos
Affiliation:
Laboratoire de Metallurgie Chimique, LMCH-DMX-EPFL, CH-1015 Lausanne, Switzerland
H.J. Mathieu
Affiliation:
Laboratoire de Metallurgie Chimique, LMCH-DMX-EPFL, CH-1015 Lausanne, Switzerland
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Abstract

Apexes of commercial pyramidal silicon scanning microscopy tips were magnetically functionalized by means of local focused electron beam induced deposition. High aspect ratio supertips and local tip coatings with varying apex diameters can be produced by varying exposure time, beam current, and scan mode. The carbonyl precursor Co2(CO)8 was used as source of magnetic metal. Tip performance was tested with magnetic force microscopy (tapping / lift-retrace mode) and magnetically actuated cantilever atomic force microscopy. The deposit contains 34±2 at.% Co, dispersed as 2-5 nm metal nanocrystals in a carbonaceous matrix. Specific surface reactions and Boudouard reactions are proposed to explain the resulting deposit composition measured by Auger spectroscopy. The electrical resistivity is 104 higher than bulk Co resistivity.

Type
Article
Information
MRS Online Proceedings Library (OPL) , Volume 706: Symposium Z – Making Functional Materials with Nanotubes , 2001 , Z9.24.1
Copyright
Copyright © Materials Research Society 2002

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