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Fabrication of Novel Hollow Micro Needles for Biological Applications

Published online by Cambridge University Press:  11 July 2011

Z. Sanaee ,
S. Mehrvarz ,
M. Mehran ,
M. Abdolahad ,
M. Sohrabi  and
S. Mohajerzadeh
Z. Sanaee
Affiliation:
Nano-electronic Center of Excellence, Thin Film and Nano-Electronic Lab, School of Electrical and Computer Eng, University of Tehran, Tehran, Iran, mohajer@ut.ac.ir
S. Mehrvarz
Affiliation:
Nano-electronic Center of Excellence, Thin Film and Nano-Electronic Lab, School of Electrical and Computer Eng, University of Tehran, Tehran, Iran, mohajer@ut.ac.ir
M. Mehran
Affiliation:
Nano-electronic Center of Excellence, Thin Film and Nano-Electronic Lab, School of Electrical and Computer Eng, University of Tehran, Tehran, Iran, mohajer@ut.ac.ir
M. Abdolahad
Affiliation:
Nano-electronic Center of Excellence, Thin Film and Nano-Electronic Lab, School of Electrical and Computer Eng, University of Tehran, Tehran, Iran, mohajer@ut.ac.ir
M. Sohrabi
Affiliation:
Nano-electronic Center of Excellence, Thin Film and Nano-Electronic Lab, School of Electrical and Computer Eng, University of Tehran, Tehran, Iran, mohajer@ut.ac.ir
S. Mohajerzadeh
Affiliation:
Nano-electronic Center of Excellence, Thin Film and Nano-Electronic Lab, School of Electrical and Computer Eng, University of Tehran, Tehran, Iran, mohajer@ut.ac.ir
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Abstract

Microneedles have applications in drug delivery and biotechnology. We report a novel needle-like hollow cylindrical structure as a base for the growth of carbon nanotubes (CNT) to form a cage-like structure. The formation of hollow microneedle structures is feasible on Si-membranes using proper patterning of the masking layer and combined by a deep reactive ion etching. The formation of highly featured structures at micro and nanometric scale is reported. By controlling the etching parameter one is able to achieve three-dimensional as well as highly vertical structures on silicon substrates. The growth of carbon nanotubes on such structures allows the realization of cage-like carbon-based features which could be suitable for gas and liquid transport.

Keywords

microelectro-mechanical (MEMS)Sibiological
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1346: Symposium AA – Micro- and Nanofluidic Systems for Materials Synthesis, Device Assembly and Bioanalysis , 2011 , mrss11-1346-aa17-05
Copyright
Copyright © Materials Research Society 2011

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References

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