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Surface Roughness of Optical Oxide Coatings Deposited From Solutions and the Morphological Effect of Different Deposition Methods

Published online by Cambridge University Press:  22 February 2011

Bulent E. Yoldas  and
Debbie P. Partlow
Bulent E. Yoldas
Affiliation:
Author is now with PPG Glass Research and Development Center, P.O. Box 11472, Pittsburgh, Pennsylvania 15238
Debbie P. Partlow
Affiliation:
Westinghouse Research and Development Center 1310 Beulah Road Pittsburgh, Pennsylvania 15235
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Abstract

Optical coatings may be deposited from clear polymeric solutions derived from metal-organic compounds. These coatings are converted to their oxide counterparts upon heating at temperatures of 400–500°C. In this work, the surface roughness of solution deposited SiO2 films were investigated in order to assess their suitability for such applications as waveguides, mirrors, etc.

SiO2 films deposited from polymeric siloxane solutions show rms surface roughness as low as 2.2Å in profile scans extending over 600 μm. The surface roughness of these films, as well as other properties, are found to be modified by the deposition method, e.g., spin or dip coating, as well as by the reaction parameters involved in the solution preparation.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 47: Symposium C – Thin Films: The Relationship of Structure to Properties , 1985 , 107
Copyright
Copyright © Materials Research Society 1985

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References

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