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Ellipsometric characterization of thin nanocomposite films with tunable refractive index for biochemical sensors

Published online by Cambridge University Press:  30 August 2011

P. Petrik ,
H. Egger ,
S. Eiden ,
E. Agocs ,
M. Fried ,
B. Pecz ,
K. Kolari ,
T. Aalto ,
R. Horvath  and
D. Giannone
P. Petrik
Affiliation:
MFA, 1121 Budapest, Konkoly Thege u. 29-33, Hungary.
H. Egger
Affiliation:
Bayer Technology Services GmbH, 51368 Leverkusen, Germany.
S. Eiden
Affiliation:
Bayer Technology Services GmbH, 51368 Leverkusen, Germany.
E. Agocs
Affiliation:
MFA, 1121 Budapest, Konkoly Thege u. 29-33, Hungary. University of Pannonia, 8200 Veszprem, Egyetem u. 10, Hungary.
M. Fried
Affiliation:
MFA, 1121 Budapest, Konkoly Thege u. 29-33, Hungary.
B. Pecz
Affiliation:
MFA, 1121 Budapest, Konkoly Thege u. 29-33, Hungary.
K. Kolari
Affiliation:
VTT, P.O. Box 1000, FI-02044, Finland.
T. Aalto
Affiliation:
VTT, P.O. Box 1000, FI-02044, Finland.
R. Horvath
Affiliation:
MFA, 1121 Budapest, Konkoly Thege u. 29-33, Hungary.
D. Giannone
Affiliation:
Multitel, 2, rue Pierre et Marie Curie, B-7000 Mons (Belgium).
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Abstract

Creating optical quality thin films with a high refractive index is increasingly important for waveguide sensor applications. In this study, we present optical models to measure the layer thickness, vertical and lateral homogeneity, the refractive index and the extinction coefficients of the polymer films with nanocrystal inclusions using spectroscopic ellipsometry. The optical properties can be determined in a broad wavelength range from 190 to 1700 nm. The sensitivity of spectroscopic ellipsometry allows a detailed characterization of the nanostructure of the layer, i.e. the surface roughness down to the nm scale, the interface properties, the optical density profile within the layer, and any other optical parameters that can be modeled in a proper and consistent way. In case of larger than about 50 nm particles even the particle size can be determined from the onset of depolarization due to light scattering. Besides the refractive index, the extinction coefficient, being a critical parameter for waveguiding layers, was also determined in a broad wavelength range. Using the above information from the ellipsometric models the preparation conditions can be identified. A range of samples were investigated including doctor bladed films using TiO2 nanoparticles.

Keywords

optical propertiespolymersensor
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1352: Symposium GG – Titanium Dioxide Nanomaterials , 2011 , mrss11-1352-gg10-02
Copyright
Copyright © Materials Research Society 2011

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References

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