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Time-Resolved Studies of Surface Melting During Laser-Induced Chemical Vapor Deposition with Laser Intensity Modulation

Published online by Cambridge University Press:  21 February 2011

Paul B. Comita ,
Peter E. Price Jr.  and
Toivo T. Kodas
Paul B. Comita
Affiliation:
IBM Research Division, Almaden Research Center, 650 Harry Road, San Jose, CA 95120
Peter E. Price Jr.
Affiliation:
Dept. of Chemical Engineering and Materials Science, University of Minnesota, Mpls., MN 55455
Toivo T. Kodas
Affiliation:
Chemical and Nuclear Engineering Dept., University of New Mexico, Albuquerque, NM 87131
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Abstract

Thermal laser-induced chemical vapor deposition of gold deposits has been studied using a modulated Ar+ laser. Deposition of gold from dimethylgold hexafluoroacetylacetonate is accompanied by surface melting of the deposit when laser source is modulated. Time-resolved reflectance measurements have been used to study the surface reflectance during growth with modulated and unmodulated laser source. The reflectance measurements indicated that surface melting does not occur under unmodulated cw irradiation at equivalent laser intensities. Variation in the modulation duty cycle indicates that there is a minimum laser-off cycle time length required for surface melting to be observed. Evidence is presented which suggests that surface melting is due to the heat released by the exothermic decomposition of reactant adsorbed during the time that the laser intensity is off.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 158: Symposium B – In-Situ Patterning: Selective Area Deposition and Etching , 1989 , 73
Copyright
Copyright © Materials Research Society 1990

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References

REFERENCES

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