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Amorphization of Thin Multilayer Films by Ion Mixing and Solid State Reaction

Published online by Cambridge University Press:  25 February 2011

M. Van Rossum ,
U. Shreter ,
W. L. Johnson  and
M-A. Nicolet
M. Van Rossum
Affiliation:
California Institute of Technology, Pasadena, CA. 91125
U. Shreter
Affiliation:
California Institute of Technology, Pasadena, CA. 91125
W. L. Johnson
Affiliation:
California Institute of Technology, Pasadena, CA. 91125
M-A. Nicolet
Affiliation:
California Institute of Technology, Pasadena, CA. 91125
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Abstract

We have compared the formation of amorphous alloys from Ni-Hf multilayer films by ion mixing and solid state diffusion. We find that ion mixing and solid state reaction produce significant differences in the composition range of the amorphous phase inside the mixed samples. Moreover, the thermochemical parameters which are of primary importance for the solid state reaction also influence the behavior of the Ni-Hf system under ion mixing.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 27: Symposium E – Ion Implantation and Ion Beam Processing of Materials , 1983 , 127
Copyright
Copyright © Materials Research Society 1984

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References

REFERENCES

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