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Low Cost Integrated Sensors Utilizing Patterned Nano-Structured Titania Arrays Fabricated Using a Simple Process

Published online by Cambridge University Press:  01 February 2011

Zuruzi Abu Samah ,
Andrei Kolmakov ,
Martin Moskovits  and
Noel C. MacDonald
Zuruzi Abu Samah
Affiliation:
Materials Department and echanical and Environmental Engineering Department, University of California at Santa Barbara, California, CA 93106.
Andrei Kolmakov
Affiliation:
Chemistry and Biochemistry Department, University of California at Santa Barbara, CA 93106.
Martin Moskovits
Affiliation:
Chemistry and Biochemistry Department, University of California at Santa Barbara, CA 93106.
Noel C. MacDonald
Affiliation:
Materials Department and echanical and Environmental Engineering Department, University of California at Santa Barbara, California, CA 93106.
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Abstract

Using a novel low-temperature process, we demonstrate the facile integration of crack-free nanostructured titania (NST) as sensing elements in microsystems. Unlike conventional sol-gel methods, NST layers of interconnected nano-walls and nano-wires were formed by reacting Ti surfaces with aqueous hydrogen peroxide solution. Cracks were observed in NST layers formed on blanket Ti films but absent on arrays of patterned Ti pads below a threshold dimension. Analyses using TEM, high resolution SEM, X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS) reveal that NST consists of anatase TiO2 nano-crystals. NST pads were found able to detect oxygen gas of a few ppm. NST pad arrays were integrated on rigid and flexible substrates with potential applications in low cost and wearable sensing systems.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 828: Symposium A – Semiconductor Materials for Sensing , 2004 , A7.5
Copyright
Copyright © Materials Research Society 2005

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References

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