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Dislocation Dynamics Simulations of Metal Nanoimprinting

Published online by Cambridge University Press:  31 January 2011

Lucia Nicola ,
Erik Van der Giessen  and
Yunhe Zhang
Lucia Nicola
Affiliation:
y.zhang@tudelft.nl, Delft University of Technology, Materials Science and Engineering, Delft, Netherlands
Erik Van der Giessen
Affiliation:
E.van.der.Giessen@rug.nl, Zernike Institute for Advanced Materials, University of Groningen, Delft, Netherlands
Yunhe Zhang
Affiliation:
l.nicola@tudelft.nl
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Abstract

Simulations of metal nanoimprinting by a rigid template are performed with the aim of finding the optimal conditions to retain imprints in a thin film on a substrate. Specifically, attention is focussed on the interface conditions between film and substrate and on the template shape. Deeper imprints are obtained when the interface between film and substrate is penetrable to dislocation motion. When the protruding contacts of the rigid template are closely spaced the interaction between neighboring contacts gives rise to material piles up between imprints.

Keywords

dislocationsfilmnano-indentation
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1224: Symposia FF/GG – Mechanical Behavior at Small Scales — Experiments and Modeling , 2009 , 1224-FF05-09
Copyright
Copyright © Materials Research Society 2010

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