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Secondary Grain Growth and Graphoepitaxy in thin Au films on Submicrometer-Period Gratings

Published online by Cambridge University Press:  22 February 2011

Chee C. Wong ,
Henry I. Smith  and
C. V. Thompson
Chee C. Wong
Affiliation:
Massachusetts Institute of Technology, Cambridge, MA 02139.
Henry I. Smith
Affiliation:
Massachusetts Institute of Technology, Cambridge, MA 02139.
C. V. Thompson
Affiliation:
Massachusetts Institute of Technology, Cambridge, MA 02139.
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Abstract

Secondary grain growth in thin Au films on SiO2 substrates with periodic surface relief structures was studied as a model for the application of graphoepitaxy (the growth of orientated crystalline films through the use of artificial surface patterning). Secondary grain growth driven by sur-face energy anisotropy produces grains many times larger than the film thickness with uniform texture. In thin films of Au on SiO2, surface-energy- driven secondary grain growth was found to occur at room temperature as soon as the film becomes continuous, and was shown to be responsible for the {111} deposition texture. A square-wave-profile grating of 0.2 μm period, etched into the surface of the substrate, resulted in preferred growth of {111}-textured grains with <112> directions oriented parallel to the grating axis. It is proposed that surface energy minimization is responsible for this phenomenon.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 47: Symposium C – Thin Films: The Relationship of Structure to Properties , 1985 , 35
Copyright
Copyright © Materials Research Society 1985

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References

REFERENCES

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