Hostname: page-component-8448b6f56d-42gr6 Total loading time: 0 Render date: 2024-04-23T14:14:09.977Z Has data issue: false hasContentIssue false
  • English
  • Français

Pt/TiO2 Growth Templates for Enhanced PZT films and MEMS Devices

Published online by Cambridge University Press:  20 January 2011

Daniel M. Potrepka ,
Glen R. Fox ,
Luz M. Sanchez  and
Ronald G. Polcawich
Daniel M. Potrepka
Affiliation:
U.S. Army Research Laboratory, Adelphi, Maryland 20783, U.S.A.
Glen R. Fox
Affiliation:
Fox Materials Consulting LLC, Colorado Springs, CO 80908, U.S.A.
Luz M. Sanchez
Affiliation:
U.S. Army Research Laboratory, Adelphi, Maryland 20783, U.S.A. Department of Materials Science and Engineering, University of Maryland, College Park, Maryland 20742, U.S.A.
Ronald G. Polcawich
Affiliation:
U.S. Army Research Laboratory, Adelphi, Maryland 20783, U.S.A.
Get access

Abstract

The crystallographic texture of lead zirconate titanate (PZT) thin films strongly influences the piezoelectric properties used in MEMS applications. For PZT films poled to saturation, the piezoelectric response is sequentially greater for random, {111}, and {001} texture. Textured growth can be achieved by relying on crystal growth habit and can also be initiated by the use of a seed layer that provides a heteroepitaxial template. Template choice and the process used to form it determine the structural quality and ultimately influence performance and reliability of MEMS PZT devices such as switches, filters, and actuators. This study focuses on how {111}-textured PZT is generated by a combination of crystal habit and templating mechanisms that occur in the PZT/bottom-electrode stack. The sequence begins with {0001}-textured Ti deposited on thermally grown SiO2 on a Si wafer. The Ti is converted to {100}-textured TiO2 (rutile) through thermal oxidation. Then {111}-textured Pt can be grown to act as a template for {111}-textured PZT. The Ti and Pt are deposited by DC magnetron sputtering. The TiO2 and Pt film textures and structure were optimized by variation of sputtering deposition times, temperatures and power levels, and post-deposition anneal conditions. The relationship between Ti, TiO2, and Pt texture and their impact on PZT growth will be presented.

Keywords

microstructurecrystallographic structurepiezoelectric
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1299: Symposium S – Microelectromechanical Systems—Materials and Devices IV , 2011 , mrsf10-1299-s02-04
Copyright
Copyright © Materials Research Society 2011

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Vaudin, M.D., Fox, G.R., and Kowach, G.R., in Mat. Res. Soc. Symp. Proc.,Vol. 721, edited by DeHaven, P.W., Field, D.P., Harkness, S.D., Sutliff, J.A., Tang, L., Thomson, T., and Vaudin, M.D.(Mat. Res. Soc., Warrendale PA, 2002) pp. 17–22.Google Scholar
2. Fox, G.R. and Sommerfelt, S., in Mat. Res. Soc. Symp. Proc., Vol. 721, edited by DeHaven, P.W., Field, D.P., Harkness, S.D., Sutliff, J.A., Tang, L., Thomson, T., and Vaudin, M.D.(Mat. Res. Soc., Warrendale PA, 2002) pp. 145–150.Google Scholar
3. Fox, G. and Suu, K., US Patent No. 6 682 772 B1 (27 January 2004).Google Scholar
4. Fox, G., Chu, F., Eastep, B., Takamatsu, T., Horii, Y., and Nakamura, K., US Patent No. 6 887 716 B2 (3 May 2005).Google Scholar
5. Al-Shareef, H.N., Dimos, D., Tuttle, B.A., and Raymond, M.V., J. Mater. Res. 12(2), 347 (1997).CrossRefGoogle Scholar
6. Fox, G.R., Trolier-McKinstry, S., Krupanidhi, S.B., and Casas, L.M., J. Mater. Res. 10(6), 1508 (1995).CrossRefGoogle Scholar
7. Chu, F., Fox, G., Davenport, T., Miyaguchi, Y., and Suu, K., Integr. Ferroelectr. 48, 161–169 (2002).CrossRefGoogle Scholar
8. Herzinger, C.M., Johs, B., McGahan, W.A., and Woollam, J.A., J. Appl. Phys. 83, 3323 (1998).CrossRefGoogle Scholar
9. Handbook of Optical Constants of Solids Vol. 1, edited by Palik, E.D. (Academic, New York, 1985) p. 759.Google Scholar
10. Flower, H.M. and Swann, P.R., Acta Metallurgica 22, 1339 (1974).CrossRefGoogle Scholar
11. Sanchez, L.M., Potrepka, D.M., Fox, G.R., Takeuchi, I., and Polcawich, R.G., in Mat. Res. Symp. Proc., Fall 2010 (Mat. Res. Soc., Warrendale PA) Manuscript S4.9.Google Scholar