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Theoretical Considerations about Phase Growth and Phase Formation

Published online by Cambridge University Press:  15 February 2011

F. M. D'Heurle
F. M. D'Heurle*
Affiliation:
IBM Research Center, PO 218, Yorktown Heights NY, 10598, USA, and F.t.e.-KTH, Electrum 229, 164 40 Kista, Sweden.
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Abstract

The first part of this paper constitutes a summary account of reactive phase formation as seen from a purely kinetic point of view. In the longer second part a more detailed analysis of phase formation based on microscopic, and calorimetric observations is presented. It is shown that these phenomena also tend to be dominated by kinetic factors. This explains why purely kinetic considerations (which should always prevail in any case at some point) usually provide a fairly accurate account of the growth of new chemical phases forming on a solid substrate, regardless of the physical state (solid, liquid or gas) of the second reactant.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 402: Symposium H – Silicide Thin Films-Fabrication, Properties and Applications , 1995 , 3
Copyright
Copyright © Materials Research Society 1996

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References

I - van Loo, F. J. J., Prog. Solid St. Chem. 20, 47 (1990).Google Scholar
2 - Gosele, U. and Tu, K. N., J. Appl. Phys. 53, 3552 (1982).Google Scholar
3 - Dybkov, V., J. Mater. Sci. 22, 4233 (1987).Google Scholar
4 - Dybkov, V., J. Phys. Chem. Sol. 53, 703 (1992).Google Scholar
5 - d'Heurle, F. M. and Gas, P., J. Mater. Res. 1, 205 (1986).Google Scholar
6 - Johnson, W. and Martin, G., Solid State Phenomena 3&4, 247 (1988).Google Scholar
7 - Johnson, W. and Martin, G., J. Appl. Phys. 68, 1252 (1990).Google Scholar
8 - Zhang, S.-L. and d'Heurle, F. M., Mater. Sci. Forum 155–156, 59 (1994).Google Scholar
9 - Philibert, J., Defect and Diffusion Forum 95–98, 493 (1993).Google Scholar
10 - d'Heurle, F. M., Gas, P., and Philibert, J., Solid State Phenomena 41, 93 (1995).Google Scholar
11 - d'Heurle, F. M., J. Mater. Res. 3, 167 (1988).Google Scholar
12 - Fitzer, E., I Plansee Seminar ü ber Pulvermetallurgie, edited by Benesovsky, F. (Springer Verlag, Wien, 1953) p. 244.Google Scholar
13 - d'Heurle, F. M., IBM Research Report, RC 18152 (Yorktown Heights NY, 1992).Google Scholar
14 - Harvey, D. L. and Cameron, G. J., J. Australian Inst. Met. 14, 255 (1969).Google Scholar
15 - d'Heurle, F. M. and Ghez, R., Thin Solid Films 215, 19 and 26 (1992).Google Scholar
16 - Barmak, K., Coffey, K. R., Rudman, D. A., and Foner, S., J. Appl. Phys. 67, 7313 (1990).Google Scholar
17 - Williams, D. S., Rapp, R. A., and Hirth, J. P., Thin Solid Films 142, 47 (1986).Google Scholar
18 - Herd, S., Tu, K. N., and Ahn, K. Y., Appl. Phys. Lett. 42, 597 (1983).Google Scholar
19 - Holloway, K., Sinclair, R., and Nathan, M., J. Vac. Sci. Technol. A 7, 1479 (1989).Google Scholar
20 - Clevenger, L. A. and Thompson, C. V., J. Appl. Phys. 67, 1325 (1990).Google Scholar
21 - Sinclair, R., Mater. Trans. Jpn. Inst. Met. 31, 628 (1990).Google Scholar
22 - Desré, P. J., Acta metall. mater. 39, 2309 (1991).Google Scholar
23 - Gusak, A. M. and Gurov, K. P., Solid State Phenomena 23&24, 117 (1992).Google Scholar
24 - Thompson, C. V., J. Mater. Res. 7, 367 (1992).Google Scholar
25 - Battezzati, L., Mater. Sci. Eng. A 178, 43 (1994).Google Scholar
26 - Bormann, R., Mater. Sci. Eng. A 178, 55 (1994).Google Scholar
27 - Bφpttiger, J., Greer, A. L., and Karpe, N., Mater. Sci. Eng. A 178, 65 (1994).Google Scholar
28 - Pereptzko, J. H., da Silva Bassani, M. H., Park, J. S., Edelstein, A. S., and Everett, R. K., Mater. Sci. Eng. A 195, 1 (1995).Google Scholar
29 - Barmak, K., Michaelsen, C., and Lucadamo, G., Mater. Res. Soc. Symp. Proc. 398 (1996) p. ?Google Scholar
30 - Brebec, G., Seguin, R., Benevot, J., and Martin, J. C., Acta Metall. 28, 327 (1980).Google Scholar
31 - Thomas, O., Charai, A. and d'Heurle, F. M., Philos. Mag. B 58, 529 (1988).Google Scholar
32 - Hillerts, M., private communication (1983).Google Scholar
33 - Grnnlund, F., Thesis, Ecole Superieure de Chimie de Paris (1958).Google Scholar
34 - d'Heurle, F. M., J. de Phys. 51 Colloque 1, 803 (1990).Google Scholar
35 - Bormann, R., Mater. Res. Soc. Symp. Proc. 343, 169 (1994).Google Scholar
36 - Turnbull, D., in Physics of Non-Crystalline Solids, edited by Prins, J. A. (North Holland, Amsterdam, 1964) p. 41.Google Scholar
37 - Spaepen, F., Solid State Physics 47, 1 (1994).Google Scholar
38 - Csanády, A., Günter, J. R., Barna, P. B., and Mayer, J., Thin Solid Films 167, 203 (1988).Google Scholar
39 - Radi, Zs., Barna, P. B., and Lábár, J., private communication (1995). Also J. Appl. Phys. in press (Jan. 1996).Google Scholar