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Control and Operation Schemes for Micro-Thermal Conductivity Detectors in Gas Chromatography

Published online by Cambridge University Press:  31 January 2011

Bradley C Kaanta ,
Hua Chen  and
Xin Zhang
Bradley C Kaanta
Affiliation:
kaanta@bu.edu, Boston University, Mechanical Engineering, Boston, Massachusetts, United States
Hua Chen
Affiliation:
hchen9@slb.com, Schlumberger Doll Research, Cambridge, Massachusetts, United States
Xin Zhang
Affiliation:
xinz@bu.edu, Boston University, Mechanical Engineering, Boston, Massachusetts, United States
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Abstract

As the use of sensor networks has expanded, the demand for robust detectors able to operate in a variety of environments has grown. We present the sensitivity testing of a micro thermal conductivity detector (μTCD) operating in two different modes. The microfabricated device we have designed and tested is composed of a resistive heating element suspended in a micro-channel, which creates excellent thermal isolation and a high heat transfer coefficient between the element and the fluid. The sensitivity of a μTCD integrated into a micro-gas chromatography (GC) system, can be increased by a factor of 10 simply by switching between operation in constant temperature and constant voltage modes. This result agrees with the analytical models and testing data previously reported for macro systems and devices.

Keywords

microelectro-mechanical (MEMS)sensorthermal conductivity
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1222: Symposium DD – Microelectromechanical Systems — Materials and Devices III , 2009 , 1222-DD05-20
Copyright
Copyright © Materials Research Society 2010

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