Hostname: page-component-8448b6f56d-mp689 Total loading time: 0 Render date: 2024-04-24T11:40:34.321Z Has data issue: false hasContentIssue false
  • English
  • Français

Stress in Thin Layers Applied by Substrate Bending; Calibration and Potentialities

Published online by Cambridge University Press:  15 February 2011

J.A. Chroboczek ,
M. Stöhr  and
T.E. Whall
J.A. Chroboczek
Affiliation:
Centre National d'Etudes Télécommunications, 38243 Meylan, France
M. Stöhr
Affiliation:
Service National des Champs Intenses, CNRS, 38240 Grenoble, France Present address: Wirtschafts und Infrastruktur Planung, 8000 Munich 70, Germany.
T.E. Whall
Affiliation:
Physics Department, University of Warwick, Coventry CV47AL, UK.
Get access

Abstract

Uniaxial stresses up to 0.3GPa, both compressive and tensile, can be generated in thin epitaxial layers by substrate bending. We demonstrate the feasibility of the method and calibrate the stress, measuring piezoresistance at temperatures below the impurity freeze-out, on lightly B-doped silicon MBE layers, using the known expression for a surface stress in a bent cantilever beam. The ground state energy displacement of B in Si thus obtained can vary by ±5meV, suggesting potential applications of the technique in tunable devices, involving doped semiconductors or heterostructures.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 308: Symposium M1 – Thin Films: Stresses and Mechanical Properties IV , 1993 , 91
Copyright
Copyright © Materials Research Society 1993

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1 Abstreiter, G., Brugger, H., Wolf, T., Jorke, H., and Herzog, H.-J., Phys. Rev. Letters, 54, 2441 (1985).CrossRefGoogle Scholar
2 Daembeks, H., Herzog, H.-J., Jorke, H., Kibbel, H., and Kasper, H., p. 217 in E-MRS Symposia Proceedings, Vol. 10A, 1986.Google Scholar
3 Bir, G.L. and Pikus, G.F., Symmetry and Strain-induced Effects in Semiconductors, J. Wiley, New York, 1974.Google Scholar
4 Chroboczek, J.A., Pollak, F.H., and Staunton, H.F., Phil. Mag. B, 50, 113 (1984).CrossRefGoogle Scholar
5 Chroboczek, J.A. and Briggs, A., Inst. Phys. Conf. Series Vol. 95, 113 (1989).Google Scholar
6 Dorda, G. and Eisele, I., Phys. Stat. Solidi A, 20, 263 (1973).Google Scholar
7 Balslev, I., Phys. Rev. 143, 636 (1966).CrossRefGoogle Scholar
8 Miller, A. and Abrahams, E., Phys. Rev. 120, 745 (1960).Google Scholar
9 Stöhr, M., Janiszewski, P., Whall, T.E., Portal, J.C., and Chroboczek, J.A., (submitted for publication to Phil. Mag. B), see also M. Stöhr, Thesis, Université Joseph Fourier, Grenoble, 1992 (in French).Google Scholar