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Effect of Working Distance on Properties of Sputtered Molybdenum Films

Published online by Cambridge University Press:  20 June 2011

Shirish A. Pethe ,
Ashwani Kaul  and
Neelkanth G. Dhere
Shirish A. Pethe
Affiliation:
Florida Solar Energy Center, University of central Florida, 1679 Clearlake Road, Cocoa, FL 32922, U.S.A.
Ashwani Kaul
Affiliation:
Florida Solar Energy Center, University of central Florida, 1679 Clearlake Road, Cocoa, FL 32922, U.S.A.
Neelkanth G. Dhere
Affiliation:
Florida Solar Energy Center, University of central Florida, 1679 Clearlake Road, Cocoa, FL 32922, U.S.A.
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Abstract

Molybdenum back contact deposition is a bottleneck in high volume manufacturing due to the current state of art where multi layer molybdenum film needs to be deposited to achieve the required properties. In order to understand and solve this problem experiments were carried out. The effect of working distance (distance between the target and the substrate) on film properties was studied and is presented in this work. Earlier work carried out at Florida Solar Energy Center reflected on the effect of the sputtering power and working gas pressure on the film properties. This work is continuation of that effort in understanding effects of various sputtering parameters and determining the possible route to develop single layer molybdenum films with the required properties of near zero stress, low resistivity and good adhesion to substrate.

Keywords

thin filmsputteringphotovoltaic
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1323: Symposium C – Advanced Materials Processing for Scalable Solar-Cell Manufacturing , 2011 , mrss11-1323-c07-03
Copyright
Copyright © Materials Research Society 2011

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References

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