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Development of Au-GCIB Dynamic SIMS and Cluster Size Filtering System

Published online by Cambridge University Press:  27 August 2014

M. Nojima ,
M. Suzuki ,
T. Adachi ,
S. Hotta ,
M. Fujii ,
T. Seki  and
J. Matsuo
M. Nojima
Affiliation:
Tokyo University of Science, RIST, 2641 Yamazaki, Noda, JP-278-8510Chiba Tokyo University of Science, Faculty of Sci. and Tech., 2641 Yamazaki, Noda, JP-278-8510Chiba
M. Suzuki
Affiliation:
Tokyo University of Science, Faculty of Sci. and Tech., 2641 Yamazaki, Noda, JP-278-8510Chiba
T. Adachi
Affiliation:
Tokyo University of Science, Faculty of Sci. and Tech., 2641 Yamazaki, Noda, JP-278-8510Chiba
S. Hotta
Affiliation:
Office Tandem. LCC., 2-16-8 Nishi-cho Kokubunji-shi, JP185-0035Tokyo
M. Fujii
Affiliation:
Quantum Science and Engineering Center, Kyoto University, Gokasho, Uji, JP-611-0011Kyoto
T. Seki
Affiliation:
Department of Nuclear Engineering, Kyoto University, Gokasho, Uji, JP-611-0011Kyoto
J. Matsuo
Affiliation:
Quantum Science and Engineering Center, Kyoto University, Gokasho, Uji, JP-611-0011Kyoto

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 1152 - 1153
Copyright
Copyright © Microscopy Society of America 2014 

References

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