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Does CdTe Deposition Affect the Impurity Profile in Sputtered CdS Window Layers?

Published online by Cambridge University Press:  01 February 2011

Mahieddine Emziane ,
Ken Durose ,
Douglas P. Halliday ,
Alessio Bosio  and
Nicola Romeo
Mahieddine Emziane
Affiliation:
Department of Physics, University of Durham, South Road, Durham, DH1 3LE, U. K.
Ken Durose
Affiliation:
Department of Physics, University of Durham, South Road, Durham, DH1 3LE, U. K.
Douglas P. Halliday
Affiliation:
Department of Physics, University of Durham, South Road, Durham, DH1 3LE, U. K.
Alessio Bosio
Affiliation:
Department of Physics, University of Parma, Parco Area delle Scienze 7a, 43100 Parma, Italy.
Nicola Romeo
Affiliation:
Department of Physics, University of Durham, South Road, Durham, DH1 3LE, U. K.
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Abstract

We report a multi-element study of impurities in CdS window layers by dynamic and quantitative SIMS. Two CdS/TCO/glass samples, grown separately using nominally the same conditions, were considered. In203:F grown on soda lime glass was used as TCO followed by a sputtered CdS layer. One of the samples was subsequently used as a substrate for growth of CdTe by CSS. SIMS was carried out on both samples, and O, Na, Si, Cl, Sb, In, Zn, Sn, Pb, Cu, Te, S and Cd were depth profiled. It was shown that before CdTe growth, most of the impurity elements showed flat levels in the CdS ranging from 2-3×1020 cm-3 for Zn and O to 2-3×1017 cm-3 for Na, Cl, Sb and Te. Si was found to segregate at the CdS/TCO interface with a maximum level of 1018 cm-3. However, following CdTe growth, the impurities in the CdS layer showed higher concentrations and different profile shape compared to those before CdTe growth. Some of the impurities also showed a diffusion-like profile following the CdTe growth as compared to before. Possible explanations of these changes are discussed in terms of the purity of the starting materials and the growth environments, as well as the diffusion from the TCO and glass.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 865: Symposium F – Thin-Film Compound Semiconductor Photovoltaics , 2005 , F14.11
Copyright
Copyright © Materials Research Society 2005

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