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MOCVD HTSC Precursor Delivery Monitored By UV Spectroscopy

Published online by Cambridge University Press:  10 February 2011

Brian J. Rappoli  and
William J. DeSisto
Brian J. Rappoli
Affiliation:
Chemistry Division, Naval Research Laboratory, Washington, D.C. 20375
William J. DeSisto
Affiliation:
Electronics Science and Technology Division, Naval Research Laboratory, Washington, D.C. 20375
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Abstract

UV spectroscopy has been used as an in situ diagnostic to measure the gas phase concentration of 2,2,6,6-tetramethyl-3,5-heptanedionate (thd) complexes of Ba, Cu and Y in metalorganic chemical vapor deposition (MOCVD) bubbler effluent. These precursors for MOCVD synthesis of YBa2Cu37−δ (YBCO) show marked instability in gas phase concentration as a function of time during bubbler purge. The UV diagnostic technique has been applied to both a small scale test system and a commercial scale MOCVD reactor.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 415: Symposium BB – Metal-Organic Chemical Vapor Deposition of Electronic Ceramics II , 1995 , 149
Copyright
Copyright © Materials Research Society 1996

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References

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