Hostname: page-component-76fb5796d-25wd4 Total loading time: 0 Render date: 2024-04-25T08:58:52.837Z Has data issue: false hasContentIssue false

Impurity Incorporation During Si Ultrafast Solidification to the Crystalline and Amorphous Phase

Published online by Cambridge University Press:  25 February 2011

Salvatore Ugo Campisano*
Affiliation:
Dipartimento di Fisica dell'Università, Corso Italia 57, 95129 Catania, Italy
Get access

Abstract

Impurity segregation at the liquid-solid interface, interfacial instabilities due to constitutional supercooling and precipitation are compared for the growth of a crystalline or of an amorphous phase from rapid solidification. Segregation at low concentration and interfacial instabilities at high concentrations are shown to give the same information. The impurity behaviour shows a distinct similarity between the crystalline and amorphous phases.

Type
Research Article
Copyright
Copyright © Materials Research Society 1985

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1) Poate, J.M and Mayer, J.W, eds. "Laser Annealing of Semiconductors" (Academic Press, New York) 1982 Google Scholar
2) Poate, J.M, Foti, G. and Jacobson, D.C, eds. "Surface Modification and Alloying" (Plenum Press, New York) 1983 Google Scholar
3) Campisano, S.U; Appl.Phys. A30, 195(1983)Google Scholar
4) Baeri, P., Campisano, S.U, Foti, G. and Rimini, E.; J.Appl.Phys. 50, 788(1979)Google Scholar
5) Baeri, P. and Campisano, S.U:"Heat Flow Calculations"; in ref. 1, chap.IV Google Scholar
6) White, C.W, Zehener, D.M, Campisano, S.U, Cullis, A.G: "Segregation, Supersaturated Alloys and Semiconductor surfaces" in ref.2, chap.IV Google Scholar
7) Liu, P.L, Yen, R., Bloembergen, N. and Hodgson, R.T; Appl .Phys.Lett. 34, 864(1979)Google Scholar
8) Cullis, A.G, Webber, H.C, Chew, N.G, Poate, J.M and Baeri, P.; Phys.Rev.Lett. 49 219(1982)Google Scholar
9) Campisano, S.U, Jacobson, D.C, Poate, J.M, Cullis, A.G and Chew, N.G; Appl.Phys.Lett. (in press Oct. 1984)Google Scholar
10) Thompson, M.O, Mayer, J.W, Cullis, A.G, Webber, H.C, Chew, N.G, Poate, J.M and Jacobson, D.C; Phys.Rev.Lett. 50, 896(1983)Google Scholar
11) Pfann, W.G: "Techniques of zone melting and crystal growing", in: "Solid State Physics" ed. by Seitz, F. and Turnbull, D. (Academic Press, New York, 1957) p.424 Google Scholar
12) Sekerka, R.F; J.of Cryst.Growth 71(1968)Google Scholar
13) Baeri, P., Foti, G., Poate, J.M, Campisano, S.U, Cullis, A.G; Appl.Phys.Lett. 38, 800 (1981)Google Scholar
14) Campisano, S.U, Foti, G. and Poate, J.M (unpublished data)Google Scholar
15) Cullis, A.G, Hurle, D.T.J, Webber, H.C, Chew, N.G, Baeri, P., Foti, G. and Poate, J.M; Appl.Phys.Lett. 38, 642 (1981)Google Scholar
16) Campisano, S.U and Poate, J.M; Appl.Phys.Lett, (in press)Google Scholar
17) Campisano, S.U, Jacobson, D.C, Poate, J.M, Cullis, A.G and Chew, N.G; Phys.Rev.Lett, (submitted)Google Scholar
18) Webber, H.C, Cullis, A.G and Chew, N.G; Appl.Phys.Lett. 43, 669(1983)Google Scholar
19) Cullis, A.G, Webber, H.C and Chew, N.G; Appl.Phys.Lett. 40, 998(1982)Google Scholar
20) Fischler, S.; J.Appl.Phys. 33, 1615(1962)Google Scholar
21) Campisano, S.U, Barbarino, A.E, Galloni, R. and Rizzoli, R.; Nucl.Instrum.& Meth. 209, 210, 645(1983).Google Scholar