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ZnO Thin Film Transistors for RF Applications

Published online by Cambridge University Press:  31 January 2011

Burhan Bayraktaroglu ,
Kevin Leedy  and
Robert Neidhard
Burhan Bayraktaroglu
Affiliation:
burhan.bayraktaroglu@wpafb.af.mil
Kevin Leedy
Affiliation:
Kevin.Leedy@WPAFB.AF.MIL, Air Force Research Laboratory, WAPFB, Ohio, United States
Robert Neidhard
Affiliation:
robert.neidhard@wpafb.af.mil, Air Force Research Laboratory, WPAFB, Ohio, United States
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Abstract

Nanocrystalline ZnO thin films grown by the pulsed laser deposition technique were used to fabricate high performance thin film transistors suitable for RF applications. It was shown that drain current on/off ratios of higher than 1×1012, sub-threshold voltage swing values lower than 100 mV/decade and hysteresis-free operation could be maintained with films grown across a wide temperature range (25°C to 400°C). Films grown at 200°C have the lowest surface roughness and result in devices with the highest current density operation. Devices with 1.2 μm gate lengths and Au-based gate metals had record current gain and power gain cut off frequencies of fT = 2.9 GHz and fmax = 10 GHz, respectively.

Keywords

devicesoxidelaser ablation
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1201: Symposium H – Zinc Oxide and Related Materials-2009 , 2009 , 1201-H09-07
Copyright
Copyright © Materials Research Society 2010

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