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Composition and Functional Properties of Organosilicon Plasma Polymers from Hexamethyldisiloxane and Octamethylcyclotetrasiloxane

Published online by Cambridge University Press:  17 March 2011

Lenka Zajickova ,
Zuzana Kucerova ,
Vilma Bursikova ,
Daniel Franta ,
Vratislav Perina  and
Anna Mackova
Lenka Zajickova
Affiliation:
Department of Physical Electronics, Masaryk University, Faculty of Science, Kotlarska 2, Brno, 61137, Czech Republic
Zuzana Kucerova
Affiliation:
Department of Physical Electronics, Masaryk University, Faculty of Science, Kotlarska 2, Brno, 61137, Czech Republic
Vilma Bursikova
Affiliation:
Department of Physical Electronics, Masaryk University, Faculty of Science, Kotlarska 2, Brno, 61137, Czech Republic
Daniel Franta
Affiliation:
Department of Physical Electronics, Masaryk University, Faculty of Science, Kotlarska 2, Brno, 61137, Czech Republic
Vratislav Perina
Affiliation:
Institute of Nuclear Physics, Academy of Sciences of the Czech Republic, Rez, 25068, Czech Republic
Anna Mackova
Affiliation:
Institute of Nuclear Physics, Academy of Sciences of the Czech Republic, Rez, 25068, Czech Republic
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Abstract

Hybrid organic-inorganic thin films with different fractions of silicon oxide were deposited in rf capacitively coupled discharges using pure hexamethyldisiloxane (HMDSO), octamethylcyclotetrasiloxane (D4) or 5 % HMDSO in O2. The deposition in continuous wave (cw) mode was compared with pulsed conditions under which the discharge on-time was 5 ms and the off-time varied from 0.5 to 15 ms. The chemical composition of the films was studied by FTIR, RBS and ERDA. Their optical properties in UV / visible / NIR were determined from spectroscopic ellipsometry and reflectance measurements fitted with a Kramers-Kronig consistent dispersion model based on a parametrization of density of states. Film hardness and reduced modulus were determined from depth sensing indentation tests.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1007: Symposium S – Organic/Inorganic Hybrid Materials-2007 , 2007 , 1007-S04-23
Copyright
Copyright © Materials Research Society 2007

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References

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