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In-homogeneous precipitation of Iron from SC1 Solutions

Published online by Cambridge University Press:  10 February 2011

D. Martin Knotter ,
Stefan de Gendt ,
Paul Mertens  and
Marc M. Heyns
D. Martin Knotter
Affiliation:
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium Assigned to IMEC from Philips Research, Prof Holstlaan 4 (WAGO 1), 5656AA Eindhoven, the Netherlands, knotter@natlab.research.philips.com
Stefan de Gendt
Affiliation:
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
Paul Mertens
Affiliation:
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
Marc M. Heyns
Affiliation:
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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Abstract

It is found that Fe in a ppb level Fe-spiked SC1 solution precipitates in-homogenous. The local high iron concentrations are difficult to rinse, create micro-roughness, and induce weak spots in capacitors. With AFM it has been shown that rings of 3–8 μm are etched in the silicon and that the etch products (silicates) are deposited on one side just outside the ring. The capacitor yield loss induced by this SC1 treatment can not be recovered fully by a subsequent SC2 or dHCL step, while a dHF/dHCl does fully recover the yield and removes the iron and silicate rim.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 477 , 1997 , 63
Copyright
Copyright © Materials Research Society 1997

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References

REFERENCES

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