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Synthesis and Characterization of Nanosized Silicon Carbide

Published online by Cambridge University Press:  10 February 2011

S. Klein ,
M. Winterer  and
H. Hahn
S. Klein
Affiliation:
Darmstadt University of Technology, Materials Science Department, Thin Films Division 64287 Darmstadt, Petersenstrasse 23, Germany
M. Winterer
Affiliation:
Darmstadt University of Technology, Materials Science Department, Thin Films Division 64287 Darmstadt, Petersenstrasse 23, Germany
H. Hahn
Affiliation:
Darmstadt University of Technology, Materials Science Department, Thin Films Division 64287 Darmstadt, Petersenstrasse 23, Germany
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Abstract

Nanosized silicon carbide powders are synthesized by the Chemical Vapor Synthesis (CVS). Grain and particle sizes are measured by XRD and BET. Agglomeration, crystallinity and the chemical composition of the SiC samples are investigated as a function of storage conditions and the CVS process parameters: precursor material, synthesis temperature and reactor length. Grain and particle sizes below 10 nm are observed in all samples.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 501: Symposium FF – Surface Controlled Nanoscale Materials for High-Added… , 1997 , 27
Copyright
Copyright © Materials Research Society 1998

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References

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