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The Improvement of Thin Polymer Film Properties Through Plasma Immersion Ion Implantation and Deposition Technique

Published online by Cambridge University Press:  21 March 2011

Elidiane C. Rangel ,
Nilson C. Cruz ,
Rogério P. Mota ,
Maurício A. Algatti ,
Roberto Y. Honda ,
Carlos Kuranaga  and
Marcos D. da
Elidiane C. Rangel
Affiliation:
Laboratório de Plasmas e Aplicações – Universidade Estadual Paulista Guaratinguetá, SP 12516-410, Brazil
Nilson C. Cruz
Affiliation:
Laboratório de Plasmas e Aplicações – Universidade Estadual Paulista Guaratinguetá, SP 12516-410, Brazil
Rogério P. Mota
Affiliation:
Laboratório de Plasmas e Aplicações – Universidade Estadual Paulista Guaratinguetá, SP 12516-410, Brazil
Maurício A. Algatti
Affiliation:
Laboratório de Plasmas e Aplicações – Universidade Estadual Paulista Guaratinguetá, SP 12516-410, Brazil
Roberto Y. Honda
Affiliation:
Laboratório de Plasmas e Aplicações – Universidade Estadual Paulista Guaratinguetá, SP 12516-410, Brazil
Carlos Kuranaga
Affiliation:
Silva Laboratório Associado de Materiais e Sensores – Instituto Nacional de Pesquisas Espaciais São José dos Campos, SP 12201-970, Brazil
Marcos D. da
Affiliation:
Silva Laboratório Associado de Materiais e Sensores – Instituto Nacional de Pesquisas Espaciais São José dos Campos, SP 12201-970, Brazil
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Abstract

Thin polymer films were deposited from acetylene and argon mixtures by plasma immersion ion implantation and deposition. The effect of the pulse frequency, ∨, on molecular structure, optical gap, contact angle and hardness of the films was investigated. It was observed progressive dehydrogenation of the samples and increment in the concentration of unsaturated carbon bonds as the pulse frequency was increased. Film hardness and contact angle increased and optical gap decreased with ∨. These results are interpreted in terms of the chain unsaturation and crosslinking.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 672: Symposium O – Mechanisms of Surface and Microstructure Evolution in Deposited Films and Film Structures , 2001 , O87.1
Copyright
Copyright © Materials Research Society 2001

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References

REFERENCES

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