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Raman Studies of Phase Transformations In Pulse Laser Irradiated Dielectric Films

Published online by Cambridge University Press:  26 February 2011

Gregory J. Exarhos
Gregory J. Exarhos*
Affiliation:
Pacific Northwest Laboratory, P. O. Box 999, Richland, WA 99352
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Abstract

Sputter deposited TiO2 and ZrO2 films on silica have been characterized with regard to thickness, phase purity, and residual film stress using nondestructive Raman spectroscopic techniques. Irradiated anatase coatings exhibit vibrational features that irreversibly shift to higher frequencies, suggesting an increase in localized stress. Catastrophic damage is manifested by the appearance of a higher density rutile phase. Rutile coatings examined after irradiation show only intensity changes, while amorphous coatings were found to rapidly crystallize under high-pulse energy irradiation. Results of these studies are compared with equilibrium Raman measurements of thermally-induced transformations in these materials.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 51: Symposium A – Beam-Solid Interactions and Phase Transformations , 1985 , 179
Copyright
Copyright © Materials Research Society 1985

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References

REFERENCES

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