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Development of Parallel Dip Pen Nanolithography Probe Arrays for High Throughput Nanolithography

Published online by Cambridge University Press:  11 February 2011

David A. Bullen ,
Xuefeng Wang ,
Jun Zou ,
Sung-Wook Chung ,
Chang Liu  and
Chad A. Mirkin
David A. Bullen
Affiliation:
Micro and Nanotechnology Laboratory, University of Illinois at Urbana-Champaign, Urbana, IL, 61801
Xuefeng Wang
Affiliation:
Micro and Nanotechnology Laboratory, University of Illinois at Urbana-Champaign, Urbana, IL, 61801
Jun Zou
Affiliation:
Micro and Nanotechnology Laboratory, University of Illinois at Urbana-Champaign, Urbana, IL, 61801
Sung-Wook Chung
Affiliation:
Department of Chemistry, Northwestern University, Chicago, IL
Chang Liu
Affiliation:
Micro and Nanotechnology Laboratory, University of Illinois at Urbana-Champaign, Urbana, IL, 61801
Chad A. Mirkin
Affiliation:
Department of Chemistry, Northwestern University, Chicago, IL
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Abstract

Dip Pen Nanolithography (DPN) is a lithographic technique that allows direct deposition of chemicals, metals, biological macromolecules, and other molecular “inks” with nanometer dimensions and precision. This paper addresses recent developments in the design and demonstration of high-density multiprobe DPN arrays. High-density arrays increase the process throughput over individual atomic force microscope (AFM) probes and are easier to use than arrays of undiced commercial probes. We have demonstrated passive arrays made of silicon (8 probes, 310 μm tip-to-tip spacing) and silicon nitride (32 probes, 100 μm tip-to-tip spacing). We have also demonstrated silicon nitride “active” arrays (10 probes, 100 μm tip-to-tip spacing) that have embedded thermal actuators for individual probe control. An optimization model for these devices, based on a generalized multilayer thermal actuator, is also described.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 758: Symposium LL – Rapid Prototyping Technologies , 2002 , LL4.2
Copyright
Copyright © Materials Research Society 2003

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References

REFERENCES

1. Piner, R., Zhu, J., Xu, F., Hong, S., and Mirkin, C., Science, 283, 661, (1999)Google Scholar
2. Demers, L., Ginger, D., Park, S., Li, Z., Chung, S., Mirkin, C., Science, 296, 1836, (2002)Google Scholar
3. Wilson, D., Martin, R., Hong, S., Cronin-Golomb, M., Mirkin, C., and Kaplan, D., Proc. Nat. Acad. Sci., 98(24), 13660, (2001).Google Scholar
4. Lee, K., Park, S., Mirkin, C., Smith, J., Mrksich, M., Science, 295, 1702, (2002)Google Scholar
5. Su, M., Liu, X., Li, S., Dravid, V. P., and Mirkin, C., J. Am. Chem. Soc., 124(8), 1560, (2002).Google Scholar
6. Maynor, B., Li, Y., and Liu, J., Langmuir, 17, 2575, (2001)Google Scholar
7. Li, Y., Maynor, B., and Liu, J., J. Am. Chem. Soc., 123, 2105, (2001)Google Scholar
8. Maynor, B., Filocamo, S., Grinstaff, M., and Liu, J., J. Am. Chem. Soc., 124(4), 522, (2002).Google Scholar
9. Ivanisevic, and Mirkin, C., J. Am. Chem. Soc., 123, 7887, (2001)Google Scholar
10. Su, M. and Dravid, V., Appl. Phys. Lett., 80(23), 4434, (2002)Google Scholar
11. Weinberger, D., Hong, S., Mirkin, C., Wessels, B., and Higgins, T., Adv. Mater., 12(21), 1600, (2000)Google Scholar
12. Hong, and Mirkin, C., Science, 288, 1808, (2000)Google Scholar
13. Zhang, M., Bullen, D., and Liu, C., Proc. of the 2001 1st IEEE Conf. on Nanotechnology, 27, (2001)Google Scholar
14. Zhang, M., Bullen, D., Chung, S., Hong, S., Ryu, K., Fan, Z., Mirkin, C. and Liu, C., Nanotechnology, 13, 212, (2002)Google Scholar
15. Liu, C., Gamble, R., Sensors Actuators A, 71, 233, (1998).Google Scholar
16. Timoshenko, S.P., J. Opt. Soc. Am., 11, 233, (1925)Google Scholar
17. Chu, W-H., Mehregany, M., Mullen, R., J. Micromech. Microeng., 3, 4, (1993)Google Scholar
18. Zhang, Y., Zhang, Y., Marcus, R.B., J. Micromech. Microeng., 8, 43, (1999)Google Scholar
19. Pamula, V., Jog, A., Fair, R., Tech. Proc. of the MSM 2001 International Conf. on Modeling and Simulation of Microsystems Conf., 410, (2001)Google Scholar
20. Min, Y., Kim, Y., J. Micromech. Microeng., 10, 314, (2000)Google Scholar
21. Fang, W., J. Micromech. Microeng., 9, 230, (1999)Google Scholar
22. Gorrell, J., Holloway, P., Shannon, K., Proc. of the Solid State Sensor and Actuator Workshop, 300, (1998)Google Scholar
23. Roark, R.J., Roark's Formulas for Stress and Strain, 6th ed., 117, McGraw-Hill, New York, (1989)Google Scholar
24. Bhushan, B., Principles and Applications of Tribology, John Wiley, New York, (1999)Google Scholar
25. Bullen, D., Liu, C., Proc. SPIE, Smart Electronics, MEMS, and Nanotechnology, SPIE's 9th Annual International Symposium on Smart Structures and Materials, 4700, 288, (2002)Google Scholar