Hostname: page-component-7c8c6479df-7qhmt Total loading time: 0 Render date: 2024-03-28T08:53:37.328Z Has data issue: false hasContentIssue false

The Influence of Ion Implantation on The Near-Surface Mechanical Properties of Ceramics

Published online by Cambridge University Press:  16 February 2011

C. J. McHargue
Affiliation:
Oak Ridge National LaboratoryOak Ridge, TN 37831–6118
M. E. O'Hern
Affiliation:
Oak Ridge National LaboratoryOak Ridge, TN 37831–6118
D. L. Joslin
Affiliation:
Oak Ridge National LaboratoryOak Ridge, TN 37831–6118
Get access

Abstract

Ion implantation of ceramics such as Al2O3 and SiC may produce a highly damaged but crystalline surface layer or an amorphous surface. The specific structure depends upon the implantation parameters. Studies using microindentation techniques show that a crystalline implanted surface has a higher hardness (by 10 to 50%) than the corresponding unimplanted crystal but the elastic modulus is essentially unchanged. The hardness and elastic modulus of amorphous implanted surfaces are less than those of the crystalline material. Estimates of the residual stress have been obtained from microindentation tests.

Type
Research Article
Copyright
Copyright © Materials Research Society 1990

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. White, C. W., McHargue, C. J., Sklad, P. S., Boatner, L. A., and Farlow, G. C., Mater. Sci. Reports 4, 43 (1989).Google Scholar
2. McHargue, C. J., Farlow, G. C., Begun, G. M., Williams, J. M., White, C. W., Appleton, B. R., Sklad, P. S., and Angelini, P., Nucl. Instrum. Meth. Phys. Res. B16, 212 (1986).Google Scholar
3. McHargue, C. J., Farlow, G. C., White, C. W., Appleton, B. R., Williams, J. M., Sklad, P. S., and Angelini, P., in Application of Ion Plating and Ion Implantation to Materials, edited by Hochman, R., (American Society for Metals, Metals Park, OH, 1986) pp. 225266.Google Scholar
4. McHargue, C. J., Farlow, G. C., White, C. W., Williams, J. M., Angelini, P., and Begun, G. M., Mater. Sci. Engr. 69, 123 (1985).Google Scholar
5. White, C. W., Farlow, G. C., McHargue, C. J., Angelini, P., Sklad, P. S., Lewis, M. B., and Appleton, B. R., Nucl. Instrum. Meth. Phys. Res. B7/8, 473 (1985).Google Scholar
6. McHargue, C. J., Lewis, M. B., Appleton, B. R., Naramoto, H., White, C. W., and Williams, J. M., in Science of Hard Materials, edited by Viswanadham, R. K., Rowcliffe, D. J., and Gurland, J. (Plenum Publishing Co., New York, 1983) pp. 451465.Google Scholar
7. Williams, J. M., McHargue, C. J., and Appleton, B. R., Nucl. Instrum. Meth. 209/210, 317 (1983).Google Scholar
8. Burnett, P. J. and Page, T. F., J. Mater. Sci. 19, 845 (1984).Google Scholar
9. Pells, G. P. and Stathopoulos, A. Y., Rad. Eff. 74 181 (1983).Google Scholar
10. Spitznagel, J. A., Wood, S., Choyke, W. J., Doyle, N. J., Bradshaw, J., and Fishman, S. G., Nucl. Instrum. Meth. Phys. Res. B16 237 (1986).Google Scholar
11. Burnett, P. J. and Page, T. F., in Science of Hard Materials edited by Almond, E. A., Brooks, C. A., and Warren, R., (Institute of Physics Conference Series Vol.75, Adam Hilger, Bristol, 1986) pp. 789802..Google Scholar
12. Burnett, P. J. and Page, T. F., J. Mater. Sci. 19 845 (1984).Google Scholar
13. Pethica, J. B., Hutchings, R., and Oliver, W. C., Phil. Mag. A48, 593 (1983).Google Scholar
14. Newey, D., Pollock, H. M., and Wilkins, M. A., in Ion Implantation into Metals, edited by Ashworth, V., Grant, W. A., and Procter, R. P. M. (Pergamon Press, Oxford, 1982) pp. 156166.Google Scholar
15. Doerner, M. F. and Nix, W. D., J. Mater. Res. 1 601 (1986).Google Scholar
16. Page, T. F., McHargue, C. J., and Oliver, W. C., unpublished work at Oak Ridge National Laboratory.Google Scholar
17. EerNisse, E. P., Appl. Phys. Lett., 18 581 (1971).Google Scholar
18. Lawn, B. R. and Fuller, E. R., J. Mater. Sci. 19 4061 (1984).Google Scholar
19. McHargue, C. J., O'Hern, M. E., White, C. W. and Lewis, M. B., Mater. Sci. Engr. A115 361 (1989).Google Scholar
20. Davisson, C. M. and Manning, I., Naval Research Laboratory Report NRL 8859 (Washington, DC, 1986).Google Scholar