Hostname: page-component-7c8c6479df-27gpq Total loading time: 0 Render date: 2024-03-28T13:43:10.656Z Has data issue: false hasContentIssue false

Progress and Prospects of Materials Characterization at Subnanometer Spatial Resolution using Finely Focussed Electron Beams

Published online by Cambridge University Press:  22 February 2011

Michael Isaacson*
Affiliation:
School of Applied and Engineering Physics and the National Research and Resource Facility for Submicron Structures, Cornell University, Ithaca, New York 14853
Get access

Abstract

The prospects of microanalysis using 0.5 nm diameter electron beams are reviewed. This paper will discuss the various characterization possibilities with emphasis on incoherent imaging, energy loss spectroscopy and convergent probe diffraction. Some examples indicating characterization at a 0.5 nm lateral spatial resolution scale will be presented and we will conclude with a discussion of the limits of nanometer characterization.

Type
Research Article
Copyright
Copyright © Materials Research Society 1985

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Isaacson, M., Analytical Chemistry (1985) submitted for publication.Google Scholar
2. Isaacson, M., “Microcharacterization: The Physics and Methodology of Materials Characterization from Volumes<1μ3.” Plenum Publishing Company (to be published).Google Scholar
3. Scheinfein, M. and Isaacson, M., SEM 1984/IV. ed. Johari, O.. (SEM, Inc., AMS Ohare, Illinois, 1984) p. 1681.Google Scholar
4. Scheinfein, M., Ph.D. Dissertation, Cornell University, May 1985.Google Scholar
5. Scheinfein, M., Muray, A. and Isaacson, M., Ultramicroscopy, 16, 223 (1985)Google Scholar
6. Scheinfein, M. and Isaacson, M., Advanced Photon and Particle Techniques for the Characterization of Defects in Solids. (Roberto, J. B., Carpenter, R. W. and Wittels, M. C., eds.) (Materials Research Society, Pittsburgh, 1984), p. 343.Google Scholar
7. Spence, J. C. H. and Lynch, J., Ultramicroscopy 9, 267 (1982).Google Scholar
8. Muray, A., Isaacson, M., Adesida, I. and Isaacson, M., J. Vac. Sci. Tech. B. 3. 367. (1985).Google Scholar
9. Bartlett, R. J., Olson, O. G. and Lynch, D. W., Phys. Stat. Sol. (b) 107.93 (1981).Google Scholar
10. Isaacson, M. and Scheinfein, M., Proc. 43rd Ann. EMSA Meeting, Louisville (1985 in press).Google Scholar
11. Fries, E., Garratt-Reed, A. J. and Vandersande, J. B., Ultramicroscopy. 9. 295 (1982).Google Scholar
12. Langmore, J. P., Isaacson, M. and Rose, H., Optik 41, 92 (1974).Google Scholar
13. Isaacson, M. EMAG 83 (Inst. Phys. Conf. Ser. 68) ed. Doig, P. (1983) p. 1.Google Scholar
14. Boyes, E. D. EMAG 83 (Inst. Phys. Conf. Ser. 68) ed. Doig, P. (1983) p. 485488.Google Scholar