Hostname: page-component-8448b6f56d-mp689 Total loading time: 0 Render date: 2024-04-23T13:27:17.167Z Has data issue: false hasContentIssue false

SURFACE STABILIZATION FOR HIGHER PERFORMANCE ALGAN/GAN HEMT WITH IN-SITU MOVPE SIN

Published online by Cambridge University Press:  01 February 2011

M. Germain
Affiliation:
IMEC, Microsystems, Components and Packaging, Kapeldreef 75, B-3001 Leuven, Belgium.
M. Leys
Affiliation:
IMEC, Microsystems, Components and Packaging, Kapeldreef 75, B-3001 Leuven, Belgium.
J. Derluyn
Affiliation:
IMEC, Microsystems, Components and Packaging, Kapeldreef 75, B-3001 Leuven, Belgium.
S. Boeykens
Affiliation:
IMEC, Microsystems, Components and Packaging, Kapeldreef 75, B-3001 Leuven, Belgium.
S. Degroote
Affiliation:
IMEC, Microsystems, Components and Packaging, Kapeldreef 75, B-3001 Leuven, Belgium.
W. Ruythooren
Affiliation:
IMEC, Microsystems, Components and Packaging, Kapeldreef 75, B-3001 Leuven, Belgium.
J. Das
Affiliation:
IMEC, Microsystems, Components and Packaging, Kapeldreef 75, B-3001 Leuven, Belgium.
R. Vandersmissen
Affiliation:
IMEC, Microsystems, Components and Packaging, Kapeldreef 75, B-3001 Leuven, Belgium.
D.P. Xiao
Affiliation:
IMEC, Microsystems, Components and Packaging, Kapeldreef 75, B-3001 Leuven, Belgium.
W. Wang
Affiliation:
IMEC, Microsystems, Components and Packaging, Kapeldreef 75, B-3001 Leuven, Belgium.
G. Borghs
Affiliation:
IMEC, Microsystems, Components and Packaging, Kapeldreef 75, B-3001 Leuven, Belgium.
Get access

Abstract

Passivation of AlGaN/GaN HEMT by SiN has been shown by several authors to improve device performance. In this paper we demonstrate a new method of passivating the top AlGaN layer, that leads to a drastic improvement of the device characteristics. On top of the AlGaN/GaN HEMT layer structures, a thin SiN layer is grown at high temperature in-situ, i.e. in the MOCVD reactor prior to unloading the HEMT epiwafers. The quality of the SiN is shown to be very high. As the AlGaN surface is protected against any air contamination, ohmic contacts deposited directly on the SiN layer exhibit better properties than on uncapped AlGaN layers. Transistor performance increases impressively: the source-drain dc current, for a positive gate voltage of 2 V, increases from 0.5 A/mm to 1.2 A/mm for similar AlGaN/GaN HEMT structures by depositing SiN in-situ. RF characteristics also show some improvement. The positive impact of in-situ SiN layer has different origins, some being intrinsically linked: surface protection against oxide formation, better ohmic contact formation, passivation of the surface states, reduction of AlGaN relaxation. All this leads to an increase of the 2DEG carrier concentration.

Type
Research Article
Copyright
Copyright © Materials Research Society 2005

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

[1] Ambacher, O., Smart, J., Shealy, J.R., Weimann, N.G., Chu, K., Murphy, M., Schaff, W.J., Eastman, L.F., Dimitrov, R., Wittmer, L., Stutzmann, M., Rieger, W., and Hilsenbeck, J., J. Appl. Phys. 85, 3222, (1999).Google Scholar
[2] Ibbetson, J.P., Fini, P.T., Ness, K.D., DenBaars, S.P., Speck, J.S., and Mishra, U.K., Appl. Phys. Lett. 77, 250, (2000).Google Scholar
[3] Vetury, R., Zhang, N.Q., Keller, S., Mishra, U.K., IEEE Tr. Elec. Dev., 48, 560, (2001).Google Scholar
[4] Kim, H., Thompson, R. M., Tilak, V., Prunty, T. R., Shealy, J.R., Eastman, L.F., IEEE Electron Device Letters, 24, 421, (2003).Google Scholar
[5] Prunty, T.R., Smart, J.A., Chumbes, E.M., Ridley, B.K., Eastman, L.F., Shealy, J.R., IEEE. IV-6, (2000).Google Scholar
[6] Germain, M., Leys, M., Boeykens, S., Degroote, S., Wang, W., Schreurs, D., Ruythooren, W., Choi, K.H., Van Daele, B., Van Tendeloo, G., Borghs, G., Mat. Res. Soc. Symp. Proc., Vol. 798, Y.10.22.1, (2004).Google Scholar
[7] Ohta, T., Kumar, R., Yamashita, Y., Hoga, H., J. Vac. Sci. Technol. B 12, 585, (1994).Google Scholar
[8] Williams, K. R. and Muller, R. S., J. Microelectromechanical Syst., 5, 256, (1996).Google Scholar
[9] Farvacque, J.L., Bougrioua, Z., Phys. Rev. B 68, (2003);Google Scholar
see also Carosella, F., Germain, M., Farvacque, J.L., this conference.Google Scholar