Hostname: page-component-7c8c6479df-5xszh Total loading time: 0 Render date: 2024-03-29T13:11:07.003Z Has data issue: false hasContentIssue false

X-Ray Diffraction from ion Implanted Zones

Published online by Cambridge University Press:  28 February 2011

Satish I. Rao
Affiliation:
Department of Materials Engineering, Virginia PolytechnicInstitute and State University, Blacksburg, Virginia 24061; K. Grabowski and J. Claaussen, Naval Research Laboratory, Washington, D.C., 20375; and C. Ice and A. Habenschuss, X-14 NSLS;, Brookhaven National Laboratory, Upton, NY 11973.
Charles R. Houska
Affiliation:
Department of Materials Engineering, Virginia PolytechnicInstitute and State University, Blacksburg, Virginia 24061; K. Grabowski and J. Claaussen, Naval Research Laboratory, Washington, D.C., 20375; and C. Ice and A. Habenschuss, X-14 NSLS;, Brookhaven National Laboratory, Upton, NY 11973.
Get access

Abstract

Measurements of x-ray profiles and diffuse scattering from (111) and (100) oriented single crystal Niobium films implanted with Nitrogen to average levels of 5 and 0.5 atomic percent are discussed. Theoretical analysis of the asymmetric Bragg profiles are used to determine the strain profile in the implanted films. The measured strain profile results from two factors: (i) depth distribution of implants and knock-on damage and (it) elastic constraints. Residual elastic strains develop due to the constraints imposed by a sapphire substrate. Comparison of the diffraction results with theoretical predictions of TRIM indicates thde presence of measurable knock-on damage in the films. Huang and Stokes-Wilson scattering measurements made using synchrotron radiation at the ORNL beanmline, Brookhaven National Laboratory, were used to reveal the identity of defects formed during the knock-on process.

Type
Research Article
Copyright
Copyright © Materials Research Society 1989

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Rao, S.I., Savino, E.J. and Houska, C.R. in ‘Mat. Res. Soc. Symp. Proc.’, V82, p187 (1987).Google Scholar
2. Timoshenko, S. and Goodier, J.N., Theory of Elasticity (McGraw-Hill, N.Y., 1970).Google Scholar
3. Dederichs, P.H., I. Phys. F. 3, 471 (1973).Google Scholar
4. Rao, S.I. and Houska, C.R., J. Appl. Phys. 52, 6322 (1981).Google Scholar
5. Krivoglaz, M.A., Theory of X-Ray and Thermal Neutron Scattering by Real Crystals (Plenum, New York, 1969).Google Scholar
6. Houska, C.R., I. Appl. Phys. 41 69 (1970).Google Scholar
7. Larson, B.C. and Young, F.W. Jr, Physica Stat. Sol. A, 104, 273 (1987).Google Scholar
8. Ohr, S.M., Phys. Stat. Sol. 64, 317 (1974).Google Scholar