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Nanostructural tuning of the texture of PZT pervoskite thin films grown by RF sputtering for piezoelectric MEMS

Published online by Cambridge University Press:  09 June 2014

Andrea Mazzalai ,
Martin Kratzer ,
Ramin Matloub ,
Cosmin Sandu  and
Paul Muralt
Andrea Mazzalai
Affiliation:
Ceramics Laboratory, École Polytechnique Fédérale de Lasuanne – EPFL Lausanne, CH-1015, Switzerland.
Martin Kratzer
Affiliation:
Oerlikon Systems R&D, Oerlikon Advanced Technologies AG Balzers, LI-9496, Liechtenstein.
Ramin Matloub
Affiliation:
Ceramics Laboratory, École Polytechnique Fédérale de Lasuanne – EPFL Lausanne, CH-1015, Switzerland.
Cosmin Sandu
Affiliation:
Ceramics Laboratory, École Polytechnique Fédérale de Lasuanne – EPFL Lausanne, CH-1015, Switzerland.
Paul Muralt
Affiliation:
Ceramics Laboratory, École Polytechnique Fédérale de Lasuanne – EPFL Lausanne, CH-1015, Switzerland.
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Abstract

Currently, large efforts are going on to scale up PZT thin film processes for large volume MEMS fabrication. It is critical to complete the scaling up with optimized film properties. In this work we report about microstructural control and piezoelectric properties of RF magnetron sputtered PZT (Pb(Zrx,Ti1−x)O3) thin films. The former is a prerequisite to achieve good properties homogeneously on the entire wafer, and with a good repeatability. We focus on the use of a commercial tool capable to reach a deposition rate of 1nm/sec with a thickness uniformity better than +/-3%. We show particularly how the texture can be chosen between (100) and (111) orientation upon tuning the thickness of a very thin TiO2 seed layer on fully passivated Pt electrodes. The surface morphology as resulting from the various grain shapes is strongly influenced by the self-bias established on the substrate, and by the growth temperature. PZT films with compact grain structure and flat surface reached a transverse piezoelectric coefficient e31,f of -23±1 C/m2 in the actuator mode (converse piezoelectric effect) and a dielectric strength of 0.5MV/cm. Both are remarkable values for un-doped, pure PZT thin films.

Keywords

piezoelectricthin filmsputtering
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1674: Symposium J – Physics of Oxide Thin Films and Heterostructures , 2014 , mrss14-1674-j03-05
Copyright
Copyright © Materials Research Society 2014 

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