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Sharp Needles: Fabrication of Tungsten Nanotips by AC Electrochemical Etching and Laser Enhanced Etching for Nanoprobing on Interconnects of Advanced Technology Nodes.

Published online by Cambridge University Press:  14 October 2013

M. K. Dawood ,
Z.H. Mai ,
T. H. Ng ,
H. Tan ,
P.K. Tan  and
J. Lam
M. K. Dawood
Affiliation:
GLOBALFOUNDIRES Singapore Pte. Ltd, 60 Woodlands Industrial Park D Street 2 Singapore 738406
Z.H. Mai
Affiliation:
GLOBALFOUNDIRES Singapore Pte. Ltd, 60 Woodlands Industrial Park D Street 2 Singapore 738406
T. H. Ng
Affiliation:
GLOBALFOUNDIRES Singapore Pte. Ltd, 60 Woodlands Industrial Park D Street 2 Singapore 738406
H. Tan
Affiliation:
GLOBALFOUNDIRES Singapore Pte. Ltd, 60 Woodlands Industrial Park D Street 2 Singapore 738406
P.K. Tan
Affiliation:
GLOBALFOUNDIRES Singapore Pte. Ltd, 60 Woodlands Industrial Park D Street 2 Singapore 738406
J. Lam
Affiliation:
GLOBALFOUNDIRES Singapore Pte. Ltd, 60 Woodlands Industrial Park D Street 2 Singapore 738406
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Abstract

Sharper nanotips are required for application in nanoprobing systems due to a shrinking contact size with each new transistor technology node. We describe a two-step etching process to fabricate W nanotips with controllable tip dimensions. The first process is an optimized AC electrochemical etching in KOH to fabricate nanotips with a radius of curvature (ROC) down to 90 nm. This was followed by a secondary nanotip sharpening process by laser irradiation in KOH. High aspect ratio nanotips with ROC close to 20 nm were obtained. Finally we demonstrate the application of the fabricated nanotips for nanoprobing on advanced technology SRAM devices.

Keywords

Welectrochemical synthesisnanostructure
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1553: Symposium T – Electrical Contacts to Nanomaterials and Nanodevices , 2013 , mrss13-1553-t03-16
Copyright
Copyright © Materials Research Society 2013 

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References

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