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Single- and Multi-target Pulsed Laser Deposition of Thin BSTO films: Preparation, Microstructure and Electrical Properties

Published online by Cambridge University Press:  01 February 2011

Kumaravinothan Sarma ,
Peter Kr. Petrov  and
Neil McN. Alford
Kumaravinothan Sarma
Affiliation:
Centre for Physical Electronics and Materials Centre, Faculty of Engineering, Science and Built Environment, London South Bank University, SE1 0AA, UK.
Peter Kr. Petrov
Affiliation:
Centre for Physical Electronics and Materials Centre, Faculty of Engineering, Science and Built Environment, London South Bank University, SE1 0AA, UK.
Neil McN. Alford
Affiliation:
Centre for Physical Electronics and Materials Centre, Faculty of Engineering, Science and Built Environment, London South Bank University, SE1 0AA, UK.
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Abstract

A comparative study of microstructure and electrical properties of BaxSr1-xTiO3 films made by single- and multi-target pulsed laser deposition was carried out. The films were epitaxially grown on both LaAlO3 and MgO substrates. The structural properties of all samples were investigated using X-ray diffraction and Raman spectroscopy. The elemental composition of the samples was investigated using energy dispersive X-ray analysis. For electrical properties examination, a simple capacitor structure was patterned on the film surface. Thin films made using both methods exhibit similar structural and electrical properties; however the samples made by a multi-target method underwent phase transition in a broader temperature region. The results prove the possibility of using the multi-target pulse laser deposition as a more flexible method for engineering thin film stoichometry.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 784: Symposium C – Ferroelectric Thin Films XII , 2003 , C8.14
Copyright
Copyright © Materials Research Society 2004

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References

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