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An Overview of Laser Chemical Processing

Published online by Cambridge University Press:  28 February 2011

Richard M. Osgood Jr
Richard M. Osgood Jr*
Affiliation:
Microelectronics Sciences Laboratories and Columbia Radiation Laboratory, Columbia University, New York, NY 10027
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Abstract

A overview of the recent developments in laser chemical processing is provided. The review covers advances in understanding fundamental process physics, the development of new techniques, and the implementation of applications.

Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 75: Symposium B – Photon, Beam, and Plasma Stimulated Chemical Processes at Surfaces , 1986 , 3
Copyright
Copyright © Materials Research Society 1987

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